Megasonics nozzles up to 5 MHz
SONOSYS® proudly presents highly effiecent contact-less cleaning with Megasonic nozzle systems. In a wide range of frequencies ranging from 600 kHz up to 5 MHz, even smallest structures can be cleaned reliably from nano particles without damaging fragile structures.
The transducer in the Megasonic nozzle generates a Megasonic wave, which is transmitted through a flowing liquid (e.g.: DI-water) to the surface of the substrate. With up to 35 W concentrated on a small point of only 4 mm results in superb results in contactless cleaning. The dual nozzle works with two distinct frequencies and provides removal of a wider range of particles.
Applications:
Cleaning of single wafers, masks, LCDs, substrates and micro electro mechanical systems (MEMS). The 600 kHz system is used in the optics and medical industries to remove larger particles.