优良的不锈钢工作台面和高刚度支撑钢架桌腿之间装有轻巧紧凑的模块式主动隔振系统,可抵消受到微小振动的影响。简化的设计使其可以成为工作站环境的一部分,无需后续调整。
The excellent stainless steel countertop and the high stiffness support steel frame between the legs are equipped with a lightweight and compact modular active vibration isolation system to counteract the effects of small vibrations. The simplified design allows it to be part of a workstation environment without the need for subsequent adjustments.
半导体制造工厂、纳米技术中心、纳米工厂和其他精密制造和研究中心通常将洁净室与活动假地面系统结合在一起,以满足复杂的设施要求(管道、电缆、燃气管道等)和保持严格的清洁标准。这种地面不适用于对振动敏感的生产、检测和计量设备。活动地面无法为这些工具提供必要的安静振动环境。我们用半导体设备隔振台架提供了一种创新的解决方案。
Semiconductor manufacturing plants, nanotechnology centers, nanofactories, and other precision manufacturing and research centers often combine clean rooms with movable false floor systems to meet complex facility requirements (piping, cables, gas lines, etc.) and maintain strict cleaning standards. This floor is not suitable for vibration-sensitive production, inspection and metrology equipment. The moving ground does not provide the necessary quiet vibration environment for these tools. We offer an innovative solution with vibration isolation benches for semiconductor devices.