Heidenhain France Sarl

2 avenue de la Cristallerie
Sèvres,  F-92310

France
http://www.etel.fr
  • Booth: 652


ETEL: your supplier 100% dedicated to direct drive solutions

Since its founding in 1974, ETEL has grown steadily to become a leading supplier of high performance motion control components and complete motion platforms. ETEL is the preferred supplier worldwide that is 100% dedicated to direct drive solutions. This clear focus allows ETEL to continue innovating in those market where precision and dynamic are the essential factor of success.

Along with its successfully components product range made of linear, torque motors and motion control solutions, the motion systems will grow significantly at ETEL over the next years.

Resulting from continuous R&D efforts, ETEL offers a wide range of mechatronics solutions addressing the most stringent requirements in the semiconductor and electronics markets. From standalone acutators to advanced motion platforms, the latter includes not only the motion system, but also the base, damping system, and frame coupled to an outstanding motion control solution.


 Press Releases

  •  

    XY Stacked System Vulcano

    The Vulcano XY system is a three-piece-design allowing a compact and cost engineered solution, coupled to mechanical bearings and high-end optical encoders.

    The baseplate of the bottom axes (Y1 & Y2) is composed of 2 ironcore linear motors, controlled in a gantry mode, when used with AccurET controllers, to allow better repeatability and optimal control efficiency. The upper axis (X) is composed of a single ironcore linear motor. The use of ironcore technology offers a high force density resulting in high acceleration and speed while keeping the operating temperature at a rather low level.

    The baseplate of the upper axis (X), which also holds the motor of the bottom axes (Y1 & Y2) is made of aluminum for mass optimization and dynamics. Thermal expansion is handle by flexure elements.

    There are 3 linear guides on the bottom plate. The two external linear guides laying on the bottom plate of VULCANO are recirculating ball bearings while the internal one (located in the middle of the baseplate) is composed of a recirculating roller bearing. The decoupling between the three guides is made through flexural elements. Some of these elements attached to the bearing blocks of the external guides allow a translation in the X direction. Some others attached to the central rail allow a rotation around the vertical direction. The upper axis (X) integrates 2 linear bearings. The decoupling is made via another set of flexural elements allowing a translation in the Y direction for one of the rail.

    The use of this platform is suitable for, but not limited to:

    • Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology
    • Back-end: specific flip-chip processes made on large panels/substrates
  • MOTION SYSTEM DESIGN

    XY table

    XY table

    This construction provides the simplest form of 2 linear degrees of freedom of a positioning system where the base of the top axis is screwed to the carriage of the lower axis.

    • Ironcore linear motors with reduced cogging
    • High precision linear encoder
    • High precision recirculating caged ball bearings, for stiffness and smooth running
    • External cable management system
    Gantry system

    Gantry system

    This configuration has the best accessibility to the space around it per footprint of the machine. It is commonly used as single cell, or in process application where several machines are operating over a conveyor.

    Gantry configuration, driven by linear motors and designed for high natural frequency, can provide an excellent solution that combines high precision, high speed and low settling time.

    Rotary table

    Rotary table

    The rotary table's performance, which significantly exceed levels achieved with a conventional solution, is determined by the best integration of these elements:

    • High performance torque motor
    • Precision bearings
    • High precision rotary encoder
    • High rigidity mechanical structure

     

  • (20161020)

     

    The RTMBi Series is a family of high precision indexing tables proposed with 5 different active lengths. Integrating ETEL direct drive torque motors, the RTMBi Series benefits from the best motor constant on the market (Nm/√W) allowing very high acceleration during indexation with low power dissipation. The RTMBi Series is the ideal standard solution for all applications where high repeatability and short indexing times are required. This highly reliable direct drive solution allows high duty cycles, high dynamics, outstanding accuracy, low maintenance and easy integration. A unique encoder-bearing solution provides the RTMBi series with the best torque to volume ratio on the market. An optimized hollow shaft size is available to accommodate customer cables and tubing. Alone or coupled with ETEL’s force controlled short stroke actuators and AccurET controllers, the RTMBi is the perfect solution for applications in back-end semiconductor manufacturing, electronics, automation, or printing, such as MEMS testers, die bonders, pick and place testers, turret testing handlers, and more!

    RTMBi series

     

     

  • The AccurET and UltimET motion control solutions benefit from ETEL’s long experience in linear/torque motors, motion systems and motion controllers. This range defines the new standard for motion control in the industry: UltimET Light motion controllers and AccurET position controllers offer unmatched performance in such a small volume. Now, the customer can improve machine’s throughput and save space at the same time!

    The full ETEL solution allows machine builders to simplify mechanical integration in their machine thanks to a very consistent design and a modular architecture that is easy to wire and mount. It also gives customers the opportunity to focus on their core competence and technology while ETEL takes care of motion systems development.

    Motion control architecture

    ETEL’s motion control solutions have been integrated into leading edge machines of various high-tech industries for more than 15 years. ETEL’s range of motion controllers (UltimET) and position controllers (AccurET) allows machine builder to drive any available servo motors on the market (brushless, DC motors, steppers) with the highest performance regulation in a minimal footprint.

    Motion control family

    Its decentralized architecture ensures the same level of performances and speed regardless the number of axes to drive in the machine. Distributed architecture also makes cabling easier to manage and to maintain in the field. Last but not least, the software environment, ComET and EDI, simplifies software development, machine installation and maintenance.


 Products

  • STACKED SYSTEMS / PLATFORMS
    The Vulcano XY system is a three-piece-design allowing a compact and cost engineered solution, coupled to mechanical bearings and high-end optical encoders....

  • The Vulcano XY system is a three-piece-design allowing a compact and cost engineered solution, coupled to mechanical bearings and high-end optical encoders.

    The baseplate of the bottom axes (Y1 & Y2) is composed of 2 ironcore linear motors, controlled in a gantry mode, when used with AccurET controllers, to allow better repeatability and optimal control efficiency. The upper axis (X) is composed of a single ironcore linear motor. The use of ironcore technology offers a high force density resulting in high acceleration and speed while keeping the operating temperature at a rather low level.

    The baseplate of the upper axis (X), which also holds the motor of the bottom axes (Y1 & Y2) is made of aluminum for mass optimization and dynamics. Thermal expansion is handle by flexure elements.

    There are 3 linear guides on the bottom plate. The two external linear guides laying on the bottom plate of VULCANO are recirculating ball bearings while the internal one (located in the middle of the baseplate) is composed of a recirculating roller bearing. The decoupling between the three guides is made through flexural elements. Some of these elements attached to the bearing blocks of the external guides allow a translation in the X direction. Some others attached to the central rail allow a rotation around the vertical direction. The upper axis (X) integrates 2 linear bearings. The decoupling is made via another set of flexural elements allowing a translation in the Y direction for one of the rail.

    The use of this platform is suitable for, but not limited to:

    • Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology
    • Back-end: specific flip-chip processes made on large panels/substrates
  • ACCURET FAMILY OVERVIEW
    The AccurET and UltimET motion control solutions benefit from ETEL’s long experience in linear/torque motors, motion systems and motion controllers. This range defines the new standard for motion control in the industry....

  • The AccurET and UltimET motion control solutions benefit from ETEL’s long experience in linear/torque motors, motion systems and motion controllers. This range defines the new standard for motion control in the industry: UltimET Light motion controllers and AccurET position controllers offer unmatched performance in such a small volume. Now, the customer can improve machine’s throughput and save space at the same time!

    The full ETEL solution allows machine builders to simplify mechanical integration in their machine thanks to a very consistent design and a modular architecture that is easy to wire and mount. It also gives customers the opportunity to focus on their core competence and technology while ETEL takes care of motion systems development.

    Motion control architecture

    ETEL’s motion control solutions have been integrated into leading edge machines of various high-tech industries for more than 15 years. ETEL’s range of motion controllers (UltimET) and position controllers (AccurET) allows machine builder to drive any available servo motors on the market (brushless, DC motors, steppers) with the highest performance regulation in a minimal footprint.

    Motion control family

    Its decentralized architecture ensures the same level of performances and speed regardless the number of axes to drive in the machine. Distributed architecture also makes cabling easier to manage and to maintain in the field. Last but not least, the software environment, ComET and EDI, simplifies software development, machine installation and maintenance.

    Why should you use ETEL’s controllers?

    • Highest performance in direct drive control
          - Deterministic synchronization or interpolation for high-end multi-axis applications
          - Advanced servo algorithms
    • Very high speed communication through ETEL real-time bus (TransnET)
    • Compact form factor and simple cabling for an easy machine building
    • ComET user-friendly software tools for setup, monitoring and system identification have been designed to help customer to improve system’s runtime capabilities
  • RTMBI ROTARY AXES
    The RTMBi Series is a family of high precision indexing tables proposed with 5 different active lengths....

  • The RTMBi Series is a family of high precision indexing tables proposed with 5 different active lengths. Integrating ETEL direct drive torque motors, the RTMBi Series benefits from the best motor constant on the market (Nm/√W) allowing very high acceleration during indexation with low power dissipation. The RTMBi Series is the ideal standard solution for all applications where high repeatability and short indexing times are required. This highly reliable direct drive solution allows high duty cycles, high dynamics, outstanding accuracy, low maintenance and easy integration. A unique encoder-bearing solution provides the RTMBi series with the best torque to volume ratio on the market. An optimized hollow shaft size is available to accommodate customer cables and tubing. Alone or coupled with ETEL’s force controlled short stroke actuators and AccurET controllers, the RTMBi is the perfect solution for applications in back-end semiconductor manufacturing, electronics, automation, or printing, such as MEMS testers, die bonders, pick and place testers, turret testing handlers, and more!

     

    Characteristics

    • Rotary tables for high dynamics indexing applications
    • 5 different heights
    • High torque to height ratio
    • High dynamics capabilities
    • Large hollow shaft for maximal flexibility
    • TMB torque motors technology providing high level of torque.

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