MK Versuchsanlagen presents further developed wet workbench at SEMICON
Energy savings up to 50% possible
The application areas of the wet workbench, which was newly introduced two years ago by MK Versuchsanlagen und Laborbedarf e.K., are extremely diverse. The metal-free system is particularly suitable for use in the semiconductor industry: substrate cleaning and pre- and post-treatment of silicon wafers, glass substrates and all other starting and end products in these production fields are possible.
The MK developers have paid particular attention to the intelligent ventilation management system, which enables energy savings of up to 50 percent. Continuous monitoring of the wet workbench ensures that the volume flow of the air introduced is automatically adjusted. The control variables are controlled via dedicated PLC modules. Possible control loops such as activity or particle monitoring are individually defined and implemented, depending on the application. Energy improvements for already existing laboratories are also possible in many cases in the form of a so called "retrofit".