The UPW Pumps are non-metallic high purity pumps, designed and manufactured to the most stringent semiconductor standards.
These pumps are the uncompromising answer to what wafer fabrication plant operators expect in order to meet current and future IRDS requirements.
All pump components exposed to the UPW are made of PVDF-HP (Polyvinylidene Fluoride High-Purity), cleaned according to strict semiconductor-grade procedure.
The use of the high quality PVDF guarantee to not release any metallic and/or oxidizable particles in the UPW.