For your applications, is this the most ideal, low-cost solution for processes that require multistep sequence. There are many advantageous features for process control and monitoring in the IDX Flexware software. With a robust integrated rotary robot system, specialized process tank configurations RENA creates a powerful and versatile platform.
At RENA equipment, the footprint is always a priority and kept minimal, of course all maintenance friendly.
The "Revolution" also provides the RENA´s drying solution Genesis Marangoni drying for dry-in and dry-out processing.
All RENA systems are available and compliant to the SECS/GEM interface of factory host.
Product Details:
- Dry-to-Dry Capabilities
- 100mm up to 200mm wafer sizes
- IDX Flexware Control Software
- Multi-Step Sequences
- Multiple Proprietary Technologies
- HMI Touchscreen
- Robust Rotary Robot
- SECS/GEM Interface Options
- Mini-environment as option
- Stainless-steel version for Solvent application
- Flexible and Upgradeable
- Tailored to Customer Specification
- Reduced Chemical & DI Water Usage
- Lower Facility Costs