Innolas Semiconductor GmbH

  • 小間番号1709-3


Welcome to the world of Innovative Laser Technology

InnoLas Semiconductor is a German based leading manufacturer of high quality

WAFER LASER MARKING and WAFER SORTING EQUIPMENT


for the semiconductor, compound and LED industries.

    
Our sister companies InnoLas Solutions and InnoLas Laser are expanding our product portfolio into the photovoltaic and other industry segments.

InnoLas is represented in several countries worldwide including

Japan, Korea, Singapore, Taiwan, China and USA.

Our products offer solutions for the following applications:


  • Laser wafer ID marking 2" - 450mm

  • Wafer sorting from 2” -450mm according to ID, thickness and weight

  • Wafer defect inspection

  •  

 


 出展製品

  • IL 1000 WMA
    ...

  • The Innolas IL 1000 WMA series laser system is designed to mark various wafer materials with diameters ranging from 2“ to 200mm.

    Different laser types and setups are available to achieve optimum process results for various materials such as Si, GaAs, Ge, SiC, GaP, InP, Sapphire, Quartz and others.

     A deep or debree free marking process is available. Our application engineers are happy to help you with the best process setup.

     The wafer marking system is controlled by a 19“ industrial PC. The powerful WindowsTM based software package includes user friendly operator and engineer interface along with sophisticated diagnostic features for maintenance and service personal.

    Software options include wafer sorting and SECS/GEM host interface. Customized software solutions are available upon request.


  • The InnoLas IL 2600 wafer sorting system can automatically
    sort, split, merge and transfer wafers from any slot / cassette to any other slot / cassette in a six cassette array. Wafer sizes from 2“ to 100mm and 100mm to 200mm can be handled in a single or multi-batch operation without the need of any mechanical adjustments. The laser mark code read for verification can be located at any position on the front and/or backside
    of the wafer. The basic model has one reading unit (OCR, BC412,

    T7) for reading the laser code on the frontside of the wafer. A second reading unit (OCR, BC412, T7) for reading the code on the backside of the wafer can be mounted as an option.

     

    Standard Options
    · Reading system for wafer front and / or backside
    · Barcode hand scanner
    · SECS/GEM host software
    · Wafer thickness measurement


  • The Innolas IL C 3000 is a state of the art class 1mini environment marking system for 300mm Siliconwafers. The system allows fully automated laser marking of polished 300mm wafers in FOUP cassettes using our debris free processing techniques. The integrated mini environment has an ionization unit with laminar flow and pressure control. The two station system can be loaded by the system operator or with an OHT (over head transport) systemfollowing the SEMI E84 standard.The unique InnoLas Semiconductor designed 300mm vacuum oredge grip handling (including aligner) is available. The system offers marking capability on the front and/or backside of the wafer.The wafer marking system is controlled by a 19“ industrial PC.The powerful WindowsTM based software package includes userfriendly operator and engineer interface along with sophisticated diagnostic features for maintenance and service personal. Software options include wafer sorting and SECS/GEM host interface.

  • InnoLas Semiconductor develops and manufactures highly efficient processing systems for laser marking, sorting and the inspection of wafers for the semiconductor industry.

    All marking and sorting processes meet the common industrial standards (SEMI, ...) for the production of semiconductor wafers. State of the art laser quality, sophisticated automation, precise handling systems and advanced application software offer greater productivity and overall system reliability.

    For wafer sizes from 2“ to 200 mm, InnoLas Semiconductor offers the IL 2000 series for wafer marking processes and the IL 2600 series as multi functional tools for wafer sorting, wafer merging/splitting and wafer inspection.

  • IL C3800 - FOUP
    ...

  • The Innolas IL C 3800 is a multi-functional system for sorting, transfering and inspection of 300mm wafers. The detailed configuration and extensive
    accessories results in the IL C 3800 being an exceptionally powerful and multi-faceted solution. The integrated mini environment has an ionization
    unit with laminar flow and pressure control. The IL C 3800 can be equipped with up to seven load/unload stations that can be loaded manually or automatically in accordance with the SEMI E84 specification. The system uses an Innolas edge grip handling system together with a patented Innolas
    edge grip aligner for automatic orientation of300mm wafers.
    The IL C 3800 offers the possibility to integrate a SEMI E63 measurement
    system. A comprehensive GEM serial communication software
    is among the numerous options available for IL C 3800 system.

 追加情報

初出展/New Exhibitor
No
新製品/New Products
Yes
製品展示/Displaying Equipment
No
デモンストレーション/ Product Demonstrations
No
産業・技術分野/ Industries/Technologies
LED/solid state lighting, MEMS, パワー半導体/Power Semiconductors, 半導体/Semiconductor