AUROS Technology, Inc.

Hwaseong-si,  Gyeonggi-do 
Korea (South)
http://www.aurostech.com/
  • 小間番号2833


Thanks for visiting Auros Technology. We always welcome you!

Auros Technology is a world’s leading provider of the most advanced technologies that help our valuable customers continually make innovation and create the new life. As a technology oriented company, Auros Technology focuses on solving technical problems of customers in metrology area of semiconductor industry.

Business sector : Auros Technology is making a big commitment to being a leader in such metrology area as overlay measurement and pellicle/mask inspection. Based on a solid foundation of technical achievement and close collaborations with customers, our products are standing out in the market with remarkable performance in the short history of the company.

1. Overlay Metrology System :

We provide state-of-the-art overlay metrology system for FEOL/MEOL/BEOL as well as Bump/uBump overlay system in the senmiconductor area. Our varous systems have been already installed in many customer sites and run well for better fab operation. 

2. Pellicle/Mask Inspectin System :

Pellicle/Mask inspection system is an outgoing QC solution to pellicle manufacturer as well as incoming QC solution to mask manufacturer, captive shop and every site using pellicles. This system is powerful and user friendly AOI equipment for finalized pellicle. Every inspection step is fully automated and has powerful various functions and high throughput.

We have more informatin about Auros Technology and our product line-up in our company web-site. please visit our web-site for more details and contact the sales person to discuss more. 

Thank you.

 


 プレスリリース

  •  

    Choi Jong-lip (fifth from left, back row) poses with children in Hwaseong, Gyeonggi Province, Monday, after donating 25 million won paid to him by Asiana Airlines in compensation for its flight crash at San Francisco International Airport on July 6. (Yonhap news)

    A Korean passenger of Asiana Airlines flight 214, which crashed on its final approach to San Francisco International Airport on July 6, has donated all of the compensation money paid to him to a child welfare center.

    Choi Jong-lip, 55, president of Auros Technology in Hwaseong, Gyeonggi Province, gave the 25 million won ($23,000) in compensation he received from the airline to the Hwaseong Hope Regional Children’s Center on Monday.

    “I am really pleased that I am the first to donate Asiana Airlines’ compensation payment to improve children’s futures,” he said in the donation ceremony at the center.

    The company also donated the same amount to the same facility in a show of support for Choi’s philanthropic conduct.

    Han Tae-geun, a senior official of the airlines, said that he would positively consider a plan for Asiana to make matching donations if passengers donate their compensation payments in the future.

    In the donation event, five members of the service corps of the airline’s employees spent about an hour treating children to a magic show and teaching them how to fold paper airplanes.

    The donated money will be used to buy 50 personal computers and five beam projectors, which will be distributed among five regional children’s centers, including Hwaseong.

    “It is difficult for children at regional centers to benefit from free online education because of the shortage of computers,” said Yoon Hyo-seok, president of an association of Hwaseong-based regional children’s centers. “I am happy that they will receive the best Chuseok gifts.”

    The crash left two passengers dead at the scene, one killed by an airport rescue vehicle, and a third died in a hospital several days later. It also injured 181 others, 12 of them critically.

    By Chun Sung-woo (swchun@heraldcorp.com) 

    http://www.koreaherald.com/view.php?ud=20130917000777


 出展製品

  • OL-600n (Overlay Metrology System)
    OL-600n is the 2nd version of overlay metrology system Auros Technology manufactured. It was released in 2013 and well recognized in many customer sites. It is still demanded and produced for many customers....

  • The OL-600n is an overlay metrology system with Auros' unique and innovative technology, which can provide the optimum performance for the 2X/1Xnm nodes. This advanced system, in particular, offers the enhanced precision, TMU(Total Measurement Uncertainty) and MAM(Move-Acquire-Measure) time for high accuracy and fast throughput. The OL-600n is also seamlessly integrated with an advanced inline data analyzer ,named EUREKA, which enables users to collect the measurement data during the production for monitoring process variation and analyzing measurement data in a user-friendly manner. In addition to these characteristics, this system has a smaller platform than the previous model(OL-300n), generating the increase in the utilization of fab space.

     

    Features

    • Best accuracy
    • High precision
    • High resolution pattern recognition
    • High system reliability
    • Yield improvement
    • Process monitoring
    • Data analysis tool (EUREKA)
    • Auto Recipe Optimization (ARO)
    • ARO manager (recipe converter)
    • High throughput
    • Low CoO (Cost of Ownership)

    Applications

    • Overlay metrology for high-end process devices (up to 2z/1x nm nodes)
    • Measurement for FEOL/MEOL/BEOL
    • Data analysis and management
    • 300mm (12”) wafers in semiconductor fabs
  • OL-300nw (uBump Overlay Metrology System)
    This is to measure uBump overlay in WLP (Wafer Level Package) fabs. It can measure CD as well as uBump overlay....

  • The OL-300nw is a metrology system that can accurately measure the alignments between very tiny pads and bumps of different sizes in the wafer level packaging and TSV process, which are new packaging technologies. This system is absolutely dedicated to improve productivity with its ability to accurately detect the huge height differences between previous and current layers as well as the function of optic CD measurement. In addition, this equipment is highlighting remarkably high throughput levels that outperform other SEMs by a large margin.

    Features

    • High precision
    • High resolution pattern recognition
    • High system reliability
    • Data analysis tool (EUREKA)
    • High throughput
    • Low CoO (Cost of Ownership)

    Applications

    • Metrology for Wafer Level Packaging(WLP) process
    • Bump & uBump overlay metrology
    • CD measurement
    • Data analysis and management
    • 300mm (12”) wafers in semiconductor fabs
  • OL-300n (Overlay Metrology System)
    This is the 1st version of Auros metrology system. It is able to applied to the technology node from 2x to 9x nm....

  • The OL-300n is the first generation of overlay metrology system manufactured by Auros Technology. This equipment was designed to provide the best solution for process control with overlay measurement. Now it still plays an important role for the fabs up to 2xnm nodes. This system is the only solution for overlay metrology from 3z to 9xnm design device at the moment in terms of throughput, reliability, CoO and service support. This equipment is also characterized by its simple and quick compatibility with various types of scanners. The automatic function for process optimization not only maximizes user convenience but also guarantees stable repeatability at the extremely high level.

     

    Features

    • High accuracy
    • High precision
    • High resolution pattern recognition
    • High system reliability
    • Process monitoring
    • Data analysis tool (EUREKA)
    • Auto Recipe Optimization (ARO)
    • ARO manager (recipe converter)
    • High throughput
    • Low CoO (Cost of Ownership)

    Applications

    • Overlay metrology for the devices from 3z to 9x nm nodes
    • Measurement for FEOL/MEOL/BEOL
    • Data analysis and management
    • 300mm (12”) wafers in semiconductor fabs
  • FPM-3000 (Pellicle/Mask Inspection System)
    This is an outgoing QC solution to pellicle manufacturer as well as incoming QC solution to mask manufacturer, captive shop and every site using pellicles. This system is powerful and user friendly AOI equipment for finalized pellicle....

  • FPM-3000 is the Pellicle/Mask Inspection System manufactured by Auros Technology, which is very powerful and user-friendly AOI equipment to inspect the finalized pellicle. This equipment conducts every inspection steps in fully automatic ways. It can inspect whole area of pellicle and mask with very high throughput. It also provides the function of defect review with high magnification. FPM-3000 is best solution for Outgoing QC to pellicle manufacturers, captive shops and all sites that are using pellicles.

    Inspection Area

    Features

    • Self-health check & Auto recovery function
    • Warning/interlock/alarm history management
    • Alarm for replacing consumable parts
    • Full inspection area (mask pattern and backside, pellicle membrane and frame)
    • Selectable inspection mode (full / partial / separated / DNIR )
    • Support client software (off-line review)
    • OCR/BCR to identify pellicle & mask (option)
    • Easy recipe creation and management
    • Low CoO (Cost of Ownership )

    Applications

    • IDM captive shop : OQC (Outgoing QC)
    • IDM photo : IQC (Incoming QC)
    • Mask shop
    • Pellicle manufacturer
  • OL-700n (Overlay Metrology System)
    OL-700n is the 3rd generation of overlay metrology system that is manufactured by Auros Technology. It is the world best accuracy and throughput and already installed in many customer sites....

  • Auros Technology has just released the latest model of overlay metrology system to more satisfy the customers' demands. As technology node is getting smaller and the margin of process control is tighter, it is getting difficult for customers to cope with accuracy, process management, productivity etc. In order to provide the best and various solutions for accuracy, yield enhancement, fab operation, productivity and so on, OL-700n is born with Auros' own technologies. This model offers more improved performances and thus is applied to the most advanced devices in the world. As this system is even faster than the previous model, it strongly helps customers with throughput and productivity. In terms of accuracy, no one can compete with this model so that it absolutely makes customers easily carry out process control. This 3rd generation of overlay metrology system is much more powerful in every aspect compared to OL-600n whose performances have been already proved in many customers' fabs.

     

    Features

    • Best accuracy
    • High precision
    • High resolution pattern recognition
    • High system reliability
    • Yield improvement
    • Accurate Overlay Control (AOC)
    • Process monitoring
    • Data analysis tool (EUREKA)
    • Auto Recipe Optimization (ARO)
    • ARO manager (recipe converter)
    • High throughput

    Applications

    • Overlay metrology for high-end process devices (up to 2z/1x nm nodes)
    • Measurement for FEOL/MEOL/BEOL
    • Data analysis and management
    • 300mm (12") wafers in semiconductor fabs

     


 追加情報

初出展/New Exhibitor
No
新製品/New Products
Yes
製品展示/Displaying Equipment
No
デモンストレーション/ Product Demonstrations
Yes
産業・技術分野/ Industries/Technologies
半導体/Semiconductor