Plan Optik AG

Elsoff, 
Germany
http://www.planoptik.com
  • 小間番号2005


Glass, fused silica and silicon for MEMS and semiconductors.

Plan Optik AG is the leading manufacturer of structured wafers when it comes to technology. In sectors such as consumer electronics, automotive, aerospace, chemistry and pharmaceuticals these wafers are essential components used as active elements for numerous applications in MEMS technology. The wafers of glass, glass-silicon compounds or quartz are available in sizes up to 300 mm diameter. Wafers by Plan Optik provide high-precision surfaces. Plan Optik wafers are available to minimum tolerances with application-specific structuring and complex material combinations.

Plan Optik AG's extensive experience in the integration of optical, electronic or chemical functions within a wafer as the basis of MEMS applications has made the company the preferred partner of large international manufacturers. Based on Plan Optik's expert knowledge the wafers are developed in collaboration with customers such as OSRAM, Infineon, Motorola, Samsung, Honeywell and Bosch.


 出展製品

  • CARRIER WAFERS
    Process carriers for the manufacture of ultra-thin substrates of silicon, gallium arsenide and other special materials...

  • Plan Optik produces carrier wafers as a carrier substrate for the processing of thin semiconductor wafers. These carriers are used to permit the safe handling of delicate semiconductor wafers (e.g. those made of silicon and gallium arsenide). Semiconductor wafers are becoming ever thinner, and at the same time the requirements as regards their thickness tolerance and surface quality for back thinning, sawing and numerous other processes continue to rise. For this reason high-precision carrier wafers (carriers) are a fundamental requirement when it comes to processing. Plan Optik manufactures these carriers using a special glass which provides the perfect substrate material in this respect, because it demonstrates excellent thermal and chemical stability. An additional advantage is the possibility of re-using such carriers - thus making an important contribution not only to the reduction of costs but also to environmental protection.
  • PACKAGING WAFERS
    Cap wafers for wafer level packaging up to 300 mm available in various materials and combinations. Applications in consumer electronics, automotive, aerospace, chemistry, pharmaceuticals and semiconductors.silicon vias)...

  • Plan Optik manufactures packaging wafers from custom-made single items to large-scale series using glass, quartz and silicon and combinations of these three materials. The diameter is 50 - 300 mm with low thickness tolerances and low ttv values. In each case the structuring of the wafer is carried out on a customer-specific basis, for example with optical cavities, coatings and drillings.

    Packaging wafers by Plan Optik are used to pack and thus to seal hermetically optical or chemical sensors, pressure sensors and acceleration sensors. Typical industrial applications lie in the fields of consumer electronics (CMOS imaging, micro-mirrors), automotive technology (pressure sensors, e.g. tires, engine monitoring), aerospace (3D acceleration sensors), chemistry (micro-reaction technology), pharmaceuticals (lab-on-chip) and in the general manufacture of semiconductors.

  • QUARTZ WAFERS
    Quartz and fused silica materials • RF applications • Minimal surface roughness • Diameters 50 - 300 mm • Thickness from 200 µm...

  • Plan Optik manufactures quartz wafers (SiO2) both as single-item production and in large-scale series using both synthetic "fused silica" and "fused quartz" extracted from natural raw materials. In contrast to crystalline quartz, the substance used here is amorphous quartz glass. The diameter is between 50 - 200 mm with low thickness tolerances, high quality surfaces and low ttv values.

    Plan Optik's quartz wafers are defined as an alkaline-free and ultra-pure substrate, virtually unadulterated by foreign matter. They are therefore used in semiconductor technology and as a coating substrate. Typical industrial fields of application include the construction of RF modules as well as micro fluidics and medicine.

    Plan Optik's quartz wafers are resistant to high temperatures and virtually non-fluorescent.


 追加情報

初出展/New Exhibitor
No
新製品/New Products
Yes
製品展示/Displaying Equipment
Yes
デモンストレーション/ Product Demonstrations
Yes
産業・技術分野/ Industries/Technologies
MEMS