centrotherm clean solutions GmbH & Co. KG

Blaubeuren, 
Germany
http://www.centrotherm-cs.de
  • 小間番号1609-1

Thermal waste gas treatment, dry bed absorber systems, wet-scrubbers or water purification systems: we are a worldwide technology leading specialist for efficient individual solutions and your reliable partner for exhaust and wastewater treatment.


 出展製品

  • Burner-Washer CT-BW for waste gas treatment
    The CT-BW point-of-use abatement set global standards and is a highly efficient system used in CVD and etching applications for photovoltaic, semiconductor and related industries....

  • As new process tools and technologies with highly corrosive gases and increasing gas loads are introduced, further improvements in abatement technologies are needed.

    The CT-BW meets those requirements and is in compliance with international safety standards. Furthermore it provides a couple of advantages such as a high destruction removal efficiency for all waste gases from CVD and etching processes, especially for PFCs as well as all kinds of solid and gaseous reaction by-products.

    The system is designed for a reliable, resource- conserving performance even under harsh process conditions. The separation of the functional units such as burner, combustion chamber, wet scrubber, waste gas inlet and cooling system allows a flexible setup for each application. The customized abatement configuration is key to keep the maintenance interval as long as possible and to maximize the uptime.

    Highlights
    - Minimizing of operating costs due to process-dependent burner performance
    - Flexible system configuration - customized features to your process requirements
    - Destruction & Removal Efficiency (DRE) of up to 99,99%
    - Low maintenance costs with a high system availability of > 98%
    - Comprehensive safety features integrated as standard
    - Quality Made in Germany

    Options
    - Broad spectrum of process-specific equipment features
    - Up to four parallel CT-BW modules in one control cabinet
    - Customized backup configurations

    Applications
    - CVD processes
    - Etch processes
    - EPI processes

    Industries
    - Semiconductor
    - Photovoltaic
    - LED-Industry
    - Universities and research institutions

  • Dry bed absorber CT-D for waste gas treatment
    The centrotherm CT-D dry bed absorber offers you a safe and efficient disposal of harmful gases which are used in the semiconductor and photovoltaic industry, without any special demands on your media supply....

  • The centrotherm CT-D dry bed absorber offers you a safe and efficient disposal of harmful gases which are used in the semiconductor and photovoltaic industry, without any special demands on your media supply. Our CT-D dry bed absorber is a passive system that only requires an electrical supply and CDA or nitrogen.The cartridge, which was specifically designed and patented by centrotherm clean solutions, is available in different sizes with various options and filled with granules based on the individual customer's application. For specific applications we use one or more different granules, which absorb the toxic, corrosive and / or inflammable products and by-products. Because of the irreversible chemical reaction with the granules at room temperature, the harmful gases are converted into non-volatile, inorganic solids.To ensure a smooth production, we offer all our customers a sophisticated cartridge exchange and granule disposal service. In detail this means that upon customer’s request a newly filled cartridge is shipped. The customer is than either replacing the cartridge on his own, alternatively the exchange will be carried out by our service team. The pick-up service of the spent cartridge and the disposal of the used up granules is organized by centrotherm, while the customer will receive a proof of waste disposal.

    Highlights
    - Low demand on media supply, long granulate lifetime
    - Minimal maintenance requirements
    - Patented absorber design with cold trap function prevents blockages
    - Specifically designed granules for various applications
    - Irreversible conversion of hazardous gases
    - No waste gas desorption due to chemisorption
    - Easy and safe cartridge replacement
    - Quality Made in Germany

    Options
    - Different cartridge sizes available

    Applications
    - R&D applications
    - CVD applications (e.g. MOCVD)
    - Etch processes
    - ALD processes
    - Ion implanters
    - CIGS

    Industries
    - Universities and research institutions
    - Semiconductor
    - Photovoltaic
    - LED-Industry


 追加情報

初出展/New Exhibitor
No
新製品/New Products
No
製品展示/Displaying Equipment
No
デモンストレーション/ Product Demonstrations
No
産業・技術分野/ Industries/Technologies
LED/solid state lighting, MEMS, 太陽光発電(PV)/Photovoltaic, 半導体/Semiconductor