CHYI DING Technologies Co., Ltd.

新竹県, 
Taiwan
http://www.chd-tech.com.tw
  • 小間番号2125


お客様のために完璧を追求。顧客至上がモットー。 気流を清浄する優れた工程。

奇鼎科技は空調洗浄、微細汚染除去観測および省エネ工程に関する精密機器カスタマイズを専門に扱うメーカーです。

主なサービス内容は、空調洗浄、温湿度管理、空気中の分子状化学汚染物質(AMC)に関連する製造工程周辺設備、省エネルギーコンサルティング、クリーン医療サービスなどの、製造工程に関連する業務です。

当社は、国内大型工場のクリーンルーム施工により創業し、創新・研究開発の精神を主軸としています。2006年に「設備研究開発部」を創設し、システムエンジニアリングの精神を維持しています。空気中の分子状化学汚染物質の除去、オンライン観測などのカスタマイズされた精密機器を提供しています。先進的な製造環境のボトルネックを突破し、お客様のために、製造環境の空気品質の制御・観測を行うことで、ハイテク工場の製造工程における歩留りを大きく向上させます。

2012年に「クリーンルーム外気空調ボックス省エネルギー水洗装置」がSBIR卓越研発成果奨を獲得しました。また、台湾IBM「省エネルギーサービス」の唯一の適格サプライヤーとなっています。国を超え、整理された角度から、グローバルな省エネコンサルティング/設計/施工サービスを提供しています。


 プレスリリース

  • Building on top of extensive experiences in clean room projects, CHD Tech crafts high-end air purifier solutions

    Sponsored content [Thursday 27 July 2017]

    According to WHO statistics, air pollution causes an alarming mortality rate of two million premature deaths a year around the world. Gaseous pollutants and particulate pollutants are the main sources of air pollution. Gaseous pollutants generally include volatile chemical contaminants or malodorous substances that could lead to cancer. Particulate pollutants are atmospheric particulate matter (PM) and those that are 2.5 microns in diameter and less are especially harmful as they can penetrate into alveoli and through vascular walls into people's blood circulatory system, jeopardizing the respiratory, cardiovascular, and nervous systems.

    An observation of Google Trends shows the number of searches for air purifiers in Taiwan has grown a whopping 270% in the period from 2015 to 2017, an indication that people in Taiwan are placing increasing importance on air quality. In light of this, CHD Tech, founded in 2005, is leveraging its extensive experiences in building semiconductor clean rooms accumulated over the years to craft air quality management solutions in the hope of effectively eliminating invisible health hazards including chemical contaminants (e.g. formaldehyde) and PM.

    Optimal air filtering performance is achieved along with meticulous spatial design

    Nicholas Su, executive assistant to general manager, CHD Tech, indicated clean room project budgets generally start from tens of millions of NT dollars and could run up to NT$100 million. Business owners usually retain 10% of the amount as final payment after CHD Tech's project passes closing inspections including stringent acceptance checks on leakage, cleanness, and other criteria. The technological know-hows in building clean rooms are similar to those for making non-industrial air purifiers so CHD Tech uses the same foundry-grade supplies to craft total air quality solutions that rise above conventional home appliances. Not just selling air purifiers or ventilation systems, CHD Tech also carefully designs the details such as equipment installation and return air path and uses professional instruments to conduct on-site checks and provide customers complete air quality inspection reports.

    CHD Tech's air solutions mainly comprise AP-550 air purifier and AW-450 fresh air system, respectively handling critical internal and external circulation, said Su.

    AP-550 is designed with a HEPA filter that spreads out to 16.9 meters in length, equivalent to the height of a six-story building, and an 8.8 square meter area, five times that of a common air purifier on the market. More importantly, AP-550 achieves airtight seal and continuous filtration with its aluminum frame, double-sided airtight design, and mesh screen, compared to conventional products that generally use paper frames without airtight design and therefore deliver less-than-optimal filtration effects due to leakage.

    In addition to the HEPA filter, AP-550 comes with two extra filters??an activated carbon filter and a pre-filter. In particular, the activated carbon filter weighing 1.7 kg absorbs odorous substances with granular activated carbon and formaldehyde with aluminum oxide and zeolite, significantly removing harmful chemicals. On the other hand, most products available on the market only have a small amount of activated carbon powder on non-woven fabric and therefore can hardly generate comparable filtering effects due to the minimum number of absorption pores. It should also be noted that AP-550 is designed with laminar air flow, different from the turbulent air flow of conventional models, so with its air outlet positioned at the height of 123cm, it can ensure clean air in the layer where people breathe. Furthermore, by separating the air paths of the upper air outlet and the lower air intake, AP-550 enables optimal interior circulation so users can enjoy a clean and healthy surrounding whether standing, sitting or lying down.

    AW-450, drawn from the concept of a clean room make-up air unit (MAU), purifies outdoor air using industry-leading air washer technology to first filter out water-soluble chemical contaminants and then eliminating non-water-soluble pollutants such as PM with a HEPA filter and sends clean air to the indoor environment. One may be curious about whether a ventilation system functions the same as a heat exchanger in theory. A heat exchanger maintains a stable temperature through heat transfer without filtering out bacteria or PM and thus is quite different from a ventilation system, explained Su.

    Ventilation systems with laminar air flow and air washer achieve powerful filtration of pollutants

    Putting the combination of AW-450 and AP-550 to use will deliver the double benefits of cleansed outdoor air and repurified indoor air, eliminating over 90% of PM and over 80% of chemical contaminants in the air.

    Su further pointed out CHD Tech also provides accessory units such as the SAR900 fan filter unit available with different duct configurations to help with indoor air purification or outdoor air cleansing. CHD Tech is also introducing the AP-204 PM air purifier suitable for a 23 square meter indoor space (calculated based on the rate of 4 air changes per hour), priced at a little more than NT$10,000, to meet the air purification needs of small areas. Despite its compact size compared to AP-550, AP-204 also comes with a HEPA filter enabling over 90% PM removal and a far superior CP ratio compared to other air purifiers on the market.

    CHD Tech is accumulating use cases of its air solutions. One example is the use of CHD Tech's AP-550 air purifier in the laboratory of the Department of Engineering Science and Ocean Engineering, National Taiwan University. Experiments in the lab generate a significant amount of ceramic dust over time which contains harmful substances potentially causing cancer, such as lead. This prompted the institution to search for industry or clean room class air purifiers in the hope of effectively reducing PM10/2.5/1.0 particles. Upon careful evaluations, CHD Tech's AP-550 was selected.

    According to measurements obtained using an Aerocet 831 aerosol mass monitor, the concentrations of PM2.5 and PM10 in the lab were respectively 126?gg/m3 and 147?gg/m3 before the use of AP-550, at least two times higher than the legal limit (35?gg/m3). After putting AP-550 to use, Aerocet 831 readings taken at the air outlet showed zero PM2.5 and PM10 concentration, an amazing 100% removal rate.

    A second success story happened at the Taoyuan Shulin Elementary School. Neighboring petrochemical factories in the Guanyin Industrial Park on three sides, the school has long been situated in an environment full of industrial air pollution. Caring for the health of the students and teachers, CHD Tech decided to donate several units of AW-450 and AP-550 to the school to help cope with the different requirements of outdoor ventilation and indoor circulation. On-site measurements at the school using a HAL-HPC300 handheld particle counter and an aeroQUAL Series 200 formaldehyde gas monitor showed an indoor formaldehyde concentration of 0.42ppm, 4.25 times higher than the legal limit (0.08ppm), indicating a dire need for improvement. With the AW-450 and AP-550 units in operation, formaldehyde concentration dropped to 0.02ppm, a removal rate of 95.24%.

    One more application scenario of AP-550 was in a soap factory of a biotechnology company, where the soap scraping operation causes dust to rise in the air, resulting in a constantly high PM2.5 concentration. A measurement taken by CHD Tech at the site indicated a concentration level of 93?gg/m3. The factory then introduced AP-550 and thereby successfully reduced PM2.5 concentration by over 91% to 8?gg/m3, an experience that others can draw from.

    CHD Tech now mainly relies on its sales team along with word-of-mouth marketing to promote its air quality management business and plans to incorporate online marketing in the future to strengthen its expansion, commented Su. Target markets will include hospitals, clinics, postpartum care centers, chemistry labs or pharmaceutical labs where concentrations of PM or harmful chemicals are generally higher and therefore there is a greater need for air purification.

    AP-550 air purifier

    AP-550 air purifier

  • CHD Tech refines maintenance service for photolithography equipment to help semiconductor foundries raise process yield and equipment availability

    Press release [Wednesday 13 September 2017]

    Photolithography process, including the steps of photoresist coating, exposure and development, plays a critical role in the manufacturing of semiconductor devices. Accordingly, how to properly control and monitor environmental quality during photolithography process through technologies such as high-precision process environment control and aerosol micro-pollutant removal is instrumental to raising process yield and equipment availability.

    In light of this, CHD Tech, founded on the core technologies of state-of-the-art air quality control, crafted high-precision micro-control equipment for fabrication environment including thermal control units (TCU) and thermal AMC units (TAU) by refining the high-precision temperature and humidity control technologies as well as particle and airborne molecular contamination (AMC) removal technologies used in clean rooms. It also leverages its core technologies to provide customers with solutions to improve and service old systems for the purpose of ensuring equipment availability and process yield.

    The needs to maintain and improve existing equipment at 8-inch wafer fab plants in Greater China and the large investments into building new semiconductor foundries in China have spurred considerable demand for clean photolithography process environment. In response to such demand for refinement and improvement in clean fabrication environment technologies, CHD Tech will bring customers more efficient solutions with shorter time-to-market, commented Chih-Wen Cheng, general manager, CHD Tech.

    There are already quite a few vendors based in Japan and Korea specializing in micro-control technologies for semiconductor manufacturing process environment. Some of them have even become partners with well-known providers of exposure machines or development/coating equipment because of their strong capabilities in temperature and humidity control. Rather than competing head-on with these worthy opponents, CHD Tech decided to gear its development toward a niche market - total solution for mini-environment. In addition to temperature and humidity control, CHD Tech also broadens its product roadmap to include particle/AMC cleaning coupled with automated detection and online analytical systems for organic gases, thereby making itself a total solution provider of micro-control technologies for semiconductor process environment.

    It should be noted that for the purpose of satisfying a range of environmental control requirements imposed by the photolithography process and helping production equipment engineers effectively troubleshoot, CHD Tech began to offer services including system diagnostics, technology refinement and maintenance improvement in 2012, highlighting the early system diagnostics, quick error detection and response, preventive maintenance and service work can help customers avoid unexpected production shutdown and minimize loss.

    CHD Tech's experienced service teams help customers perfect their fabrication process

    When commenting on CHD Tech's advantages, Cheng said with operation bases and service teams stationed throughout Taiwan and China, CHD Tech is able to offer prompt technical support to help customers resolve issues within eight hours on average so that customers are assured of the reliability of their photolithography process environment. Furthermore, the CHD Tech service teams comprise professionals with extensive experiences in photolithography process or exposure machine, development and coating equipment. Not only can they help raise maintenance efficiency but they can also provide professional advice on how to improve customers' fabrication environment and enhance operation performance of various process equipment.

    To enable high-efficiency customer service, CHD Tech maintains a complete inventory of spare parts including leading brand fans, evaporators, expansion valves, gate valves, refrigerant and compressors. In the case that any module of customers' equipment encounters a problem, CHD Tech can quickly replace the failed module with a working spare unit without having to conduct time-consuming on-site repair. This unique service model allows a wide range of issues to be resolved in no time, thereby shortening production downtime and minimizing losses.

    By providing services on a regular basis, CHD Tech is able to stay aware of any additional needs customers may have, maintain long-term relationships to increase customer retention and build tight collaboration with production equipment engineers, which fosters tremendous values for the future. Therefore, CHD Tech will continue to devote efforts to such overhaul service even though it may take some time to have real contribution to revenues, emphasized Cheng.

    In summary, CHD Tech takes pride in being a total solution provider of micro-control and micro-measurement technologies for semiconductor fabrication process. It is able to achieve a temperature control precision of ±0.01 degree and a humidity control precision of ±0.5%, likely the only vendor in Greater China capable of doing so. More importantly, CHD Tech is actively targeting tool vendors based in Germany, Japan and the US starting with capturing opportunities in the business of process equipment modification. CHD Tech endeavors to demonstrate its value during the collaboration with these tool vendors and subsequently make its way to becoming a qualified supplier for them. The strategy combining both aggressive and steady approaches is generating results. CHD Tech has made itself a supplier of standard thermal control units to a leading German semiconductor coating and exposure machine manufacturer. It is also being advised and validated by a major American semiconductor process equipment maker to become an official supply partner.

    CHD Tech's maintenance service for photolithography equipment

    DIGITIMES' editorial team was not involved in the creation or production of this content. Companies looking to contribute commercial news or press releases are welcome to contact us.


 出展製品

  • 精密恒温恒湿機
    パネル製造、ウェハー工場、ICの封止等の検査工場で精密溫湿度制御を提供し、露光機と塗布・現像設備の良品率アップを促進する。...

  •    仕様   

    ■ 清浄度制御:ISO Class 1
    ■ 温度制御精度: ±0.1℃ ~ ±0.01℃
    ■ 湿度制御精度:±2%RH  ~ ±0.5%RH
    ■ 装置に内蔵された温湿度プロファイル資料、警報装  置(アラーム)、遠隔監視制御と自動防御機能付き。

      応用種類  

    ■ 産業分類
    半導体製造、フラットパネルディスプレイ(FPD)
    精密機器工業加工、精密測量、学術研究
    ■ サプライチェーン
    パネル製造、カラーフィルター、
    ウェハー製造と封止検査
    ■ 応用範囲
    RGBレジスト塗布、露光現像、
    レンズ研削レーザー加工、幾何学の寸法測量 

  • 恒温恒湿微汚染除去設備
    露光装置鏡面の曇りを防止することができ、機器の寿命の延長ができる。...

  •   仕様  

    ■ 清浄度制御: ISO Class 4
    ■ 温度制御精度:±0.5℃ ~ ±0.05℃ 
    ■ 湿度制御精度:±5%RH ~ ±0.5%RH 
    ■ 飛散汚染物質分子除去:>90% in Main AMC
    ■ 装置に内蔵された温湿度プロファイル資料、 警報装置(アラーム) 、遠隔監視制御と自動防御する機能を備えている。

      機能  

    ■ 製品エッチングと現像の良品率を向上させる
    ■ 露光装置鏡面の曇りを防止することができ、機器の寿命の延長ができる。
    ■ 装置内部の腐食を防止する。(特に銅管類の材料)
    ■ フォトリソグラフィに一年間の使用後に対する:
    1. 鏡面の曇りの防止
    2. 照明器具に対する 一定照度継続と寿命の延長

      応用種類  

    ■ 産業分類

    半導体製造、フラットパネルディスプレイ(FPD)

    ■ サプライチェーン

    パネル製造、カラーフィルタ、ウェハー製造と封止検査

    ■ 応用範囲

    RGBレジスト塗布、露光現像、

    露光装置鏡面の曇りの防止

  • 多種ガス オンライン解析システム
    高機能の半導体製造プロセスで酸やアルカリなどの有機物質を分析する...

  •   仕様  

    ■ -ppbレベルでの測定可能
    ■ 毎5分1回のデータ分析
    ■ IAE-1000 (1台)の監視と測定するポイントは 40か
       所以上
    ■ 最大サンプル収集の距離 200m
    ■ 自動に異常ガスを記録する

      機能  

    ■ 高機能の半導体製造プロセスで酸やアルカリなどの有機物質を分析する
    ■ 1台化した分析システムと自動サンプル収集システム
    ■ 工数削減を目的としたGEM機能付き

      応用種類  

    ■ 産業分類
    半導体製造、パネル製造
    ■ サプライチェーン
    ウェハー製造工場、パネル製造工場、封止と検査する工場、ウェーハボックス(FOUP)
    ■ 応用範囲
    フォトリソグラフィプロセス、エッチングプロセス 、化学気相成長プロセス、クリーンルーム、ウェーハの保管

  • 極小気体状微細汚染物オンライン分析器
    環境中の微細汚染物の成分や、汚染の程度をすばやく測定することができます。...

  •   仕様  

    ■ 快速オンライン分析
    ■ 優れた機能(種類判別可能)
    ■ 高敏感度(検出限界が低い)
    ■ 高い精確性
    ■ ポータブル 
    ■ カスタム可能 
    ■ 合理的な価格 

      機能  

    μGCは、当社が開発した、ポータブルな、極小気体状汚染物オンライン分析器です。精巧でシンプルなスタイル。環境中の微細汚染物の成分や、汚染の程度をすばやく測定することができます。操作が簡単で、すばやく精確な測定が可能です。また、数値を直接読み取ることができます。生産能力の向上、管理システムの構築、そして安全衛生のための最重要ツールです。

      応用種類  

    半導体工場、オプトエレクトロニクス工場およびその他のハイテク工場、または従来型工業の機械または製造工程の周辺環境空気品質。また、大気品質、室内空気品質などの測定に使用可能。

  • SRU有機溶剤回収設備
    有機気体を回収し、有効なフォトレジスト剤を収集...

  •   仕様  

    ■ 有機気体を回収し、有効なフォトレジスト剤を収集
    ■ 新液の使用量を大幅に削減
    ■ もっとも合理的・実用的な管路系統設計
    ■ Solvent回収率60%以上
    ■ 設備保証期間:非人為的な原因の場合、1年間
    ■ Up time >99%
     (設備がshut downしても本体の運転に影響しない)

      機能  

    Coatingのプロセスで、塗布ノズルを常に洗浄しなければならないため、Coater VCD exhaustの気体を利用。熱交換器と純化装置により、その中のsolventを収集し、液体貯蔵槽に保管します。純化後のsolventをwasherで塗布ノズル上に吹きかけ、洗浄を行います。

    PGMEA Coaterに適用することができます。


 追加情報

初出展/New Exhibitor
No
新製品/New Products
Yes
製品展示/Displaying Equipment
No
デモンストレーション/ Product Demonstrations
No
産業・技術分野/ Industries/Technologies
LED/solid state lighting, 太陽光発電(PV)/Photovoltaic, 半導体/Semiconductor