○テストウェハー/Test wafer 取扱サイズ/size:φ6″,φ8″,φ12″
パーティクル数値等、ご要望の仕様に合わせたポリッシュドウェハーをご提供いたします。/Let us know your requiring specification including particle level.
(テストウェハー納入実績仕様例)/ Spec example
Diameter 300mm
Growth Method: CZ
Finish: DSP
Orientation <100>
Notch Orientation 1-0-0 or 1-1-0 Type
Dopant P/Boron
Res: As your request
Thickness: As your request
TTV:As your request
Bow :As your request
WARP:As your request
Particles:As your request
Laser Mark T7+M12 or T7
MCL <1E10 atoms.cm