Purion H ion implanters bring the industry-leading process control of our medium current platforms to the full range of demanding, high-current applications. The flexibility of the platform enables us to tailor Purion H to the specific energy or dosing requirements of your application. The Purion H offers unmatched versatility, throughput and uniformity, so you can achieve greater yield with the lowest cost of ownership.
The Purion high current products are built from three device enabling Purion lines:
- Purion H—covering traditional energy and dose application space. For general high current applications.
- Purion Dragon—a high performance platform that excels in Purity, Precision and Productivity. Targeted for leading-edge applications, especially in low energy high dose.
- Purion H200—the newest product line in the Purion Platform. Purion H200 offers high energy, high current capability targeting the power device market.
The Purion high current product line offers unmatched Purity, Precision and Productivity, so you can achieve greater yield with the lowest cost of ownership.