ECI Technology International

Yongin-si, Gyeonggi-do, 
Korea (South)
http://www.ecitechnology.com
  • Booth: B827


New generation of products, technologies & solutions.

ECI Technology is the leading provider of Chemical Management Systems for Semiconductor, PV, and PCB industries.  Our technologies help make possible the manufacturing of computer chips, flat panels, solar panels, printed circuit boards and more.

Established in 1987, ECI now boasts thousands of satisfied customers worldwide.  From R&D labs to high volume manufacturing environments, ECI's products offer the best flexibility, accuracy, and reliability, where it matters most.

ECI's strength lies in adapting to the world's most rapidly changing industries.  Our lab develops new products and procedures for novel applications as (or sometimes before) they are introduced into various industries.  Our unmatched experience and worldwide network of representatives enable us to be first to market and offer the most comprehensive solution for control of complex manufacturing processes.  As a result, ECI owns dozens of U.S. and international patents.

Recognized both for technological innovations and business acumen, many awards adorn our walls at ECI Headquarters, located in Totowa, New Jersey, USA.  These include top 50 fastest growing companies in New Jersey.


 Press Releases

  • (20171210)

    Introduce

    ECI Technology will be exhibiting a new generation of products, technologies, and solutions at Semicon Korea, February 8-10, in booth #1361 at COEX in Seoul, South Korea.

    ECI Technology is the only company supplying fully qualified chemical metrology for sub-10nm nodes to leading foundry, IDM, and equipment suppliers in the Semiconductor industry!

    About ECI

    ECI Technology is the leading provider of Chemical Management Systems for Semiconductor, PV, and PCB industries.  Our technologies help make possible the manufacturing of computer chips, flat panels, solar panels, printed circuit boards and more.

    Established in 1987, ECI now boasts thousands of satisfied customers worldwide.  From R&D labs to high volume manufacturing environments, ECI's products offer the best flexibility, accuracy, and reliability, where it matters most.

    ECI's strength lies in adapting to the world's most rapidly changing industries.  Our lab develops new products and procedures for novel applications as (or sometimes before) they are introduced into various industries.  Our unmatched experience and worldwide network of representatives enable us to be first to market and offer the most comprehensive solution for control of complex manufacturing processes.  As a result, ECI owns dozens of U.S. and international patents.

    Recognized both for technological innovations and business acumen, many awards adorn our walls at ECI Headquarters, located in Totowa, New Jersey, USA.  These include top 50 fastest growing companies in New Jersey, NJTC Electronics Company of the Year, and Ernst & Young's Entrepreneur of the Year National Finalist, awarded to our CEO, Marianna Rabinovitch.

    ECI Industry

    • Semiconductor & PCB

      • Plating

        • < >< >

          Wafer Level Packaging

        • IC Substrates/PLP

        • < >

          Surface Preparation

          • PERR (Post Etch Residual Removal)

          • Hot Phos Silicon Nitide Etch

      • < >

        Surface Roughening

    • Photovoltaic

      • a customized solution to control your texturing, plating, clean, etch, and other processes


 Products

  • Quali-Line QUANTÅ
    The Quali-Line QUANTÅ is ECI’s state-of-the-art analyzer designed to monitor Co electroplating solutions with a low cost and high degree of accuracy and reproducibility....

  • Features

    • Support for all commercial chemistries/formulations
    • Automatic validation and calibration
    • Seamless integration with plating tools
    • Effective and reliable delivery system
    • Smart-E software

    Options

    • NOWPak® reagent delivery system
    • Real-time Standard Generator (RSG)

    The electrical properties of Tungsten (W) are fast approaching their limitation at the sub-10nm technology node in the semiconductor industry. Cobalt (Co) is a very strong candidate for the replacement of W and electrodeposition is the method of choice.

    The Co electroplating process requires a very accurate and reliable control of the key ingredients in the plating solution.

    The Quali-Line QUANTÅ is ECI’s state-of-the-art analyzer designed to monitor Co electroplating solutions with a low cost and high degree of accuracy and reproducibility.

    ECI designed the Quali-Line QUANTÅ to be a comprehensive and fast chemical metrology analyzer, seamlessly integrated with Cobalt plating tools for both high volume production and cutting edge process development.

    Quali-Line QUANTÅ delivers:

    • Specially developed CVS applications
    • Customized analyses of other bath components
    • and their properties
    • Ease of use with smart-E software
    • Low CoC
  • Quali-Line 7500E
    The QUALI-LINE® QLC-7500E is the latest generation of ECI’s On-Line, Chemical Monitoring Systems (CMS). QLC-7500E was designed to provide analysis capabilities for Front-End plating applications in R&D and high volume manufacturing fabs....

  • Features

    • Results are validated with chemical standards so accuracy is assured
    • Automatic calibration Non-Reagent analysis for Cu and Acid to reduce CoO, waste and maintenance costs
    • Express diagnostics of Bath abnormalities such as overdose, dilution, evaporation, contamination
    • Reduction of sample volume
    • DCA™ - Dual Component Analysis patented technique for combined analysis of 2 organic components in 1 step.
    • One system capable of analyzing up to 4 plating tools plus 1 manual sample
    • The largest variety of analytical procedures ever offered
    • Rapid development for new chemistries
    • Full control of temperature, mixing procedures and more
    • Closed-loop communication with major tool manufacturers
    • Small footprint

    Software Platform

    • Graphical User Interface - more data viewable on the screen; fast and easy
    • Preventive Maintenance Tracking module for increased uptime and reliability
    • Online Statistics and control
    • Flexible determination of species and techniques
    • Multi Database support
    • User friendly SPC and Trend analysis with Smart Alarms configurations

    The QUALI-LINE® QLC-7500E is the latest generation of ECI’s On-Line, Chemical Monitoring Systems (CMS). QLC-7500E was designed to provide analysis capabilities for Front-End plating applications in R&D and high volume manufacturing fabs. The analytical techniques incorporated in QLC-7500E provide complete chemical metrology solutions to the tightest specifications necessary for today and tomorrow's technology nodes.
    ECI’s 25+ years of experience and leadership in plating bath analysis are captured in the new design.

    QLC-7500E incorporates CVS Express™, other non-reagent electrochemical techniques, and spectroscopy to meet the stringent requirements of accuracy and reproducibility while minimizing Cost of Ownership. This combination allows for reduction of chemical reagents drastically decreases maintenance and waste generation while increasing overall system efficiency and reliability.

    QLC-7500E's software platform introduces new analytical techniques, improved algorithms, and extended reporting capabilities.
    QLC-7500E features seamless integration with plating tool and an application library containing over 200 Copper Chemistries

    Specifications

    Organic Analysis: Accelerator, Suppressor, and Leveler Accuracy +/-5% or better Repeatability +/-4% or better

    Inorganics Analysis: Copper, Chloride, and Acid Accuracy +/-3% or better Repeatability +/-2% or better

    FM-4910 Compliant closure material

  • Quali-Fill Chemical Management System
    Quali-Fill Chemical Management System provides analysis and dosing for Electroplating or Electroless TSV and Wafer Level Packaging (WLP) applications....

  • Features

    Supports all major chemistries
    Modular, expandable, flexible
    Field-proven in high volume manufacturing and R&D
    Seamless integration with plating tool
    Comprehensive analysis of all components:
    - metals, acids, complexing agents, surfactants,
      grain refiners, pH, specific gravity
    Automatic calibration and validation of results
    Reagents compatible with plating solutions
    Non-hazardous waste
    Analytical techniques are integrated based on CoO and desired specifications

    • Analytical techniques:
      - CVS (Cyclic Voltametric Stripping)
      - Titration
      - Spectroscopy (UV-Vis, NIR)
      - Non-Reagent Potentiometry
      - Dissolved Oxygen
      - Extractions

    Quali-Fill Chemical Management System provides analysis and dosing for Electroplating or Electroless TSV and Wafer Level Packaging (WLP) applications.  Quali-Fill systems feature a modular design capable of maintaining entire Bump, RDL, UBM, or Cu Pillar processes.  The system consists of a Master module and one or more Satellite modules, controlled by the Master.  Each module is dedicated for analysis of a specific chemsitry, such as Cu, SnAg, Ni, or Au.  Quali-Fill can be extended in the field by adding Satellite modules for additional chemistries. Coupled with Quali-Dose, the system automatically manages your plating processes with maximum efficiency. It is qualified as "Process Of Record" in the world's most advanced semiconductor manufacturing facilities.

  • Quali-Surf QSF-500
    Quali-Surf QSF-500 is designed to accurately measure ppm levels of Silica in hot Phosphoric Acid solutions. This online system provides fast results and interfaces seamlessly with Nitride Wet Etch stations....

  • Features

    • Fast and accurate results in 0-100ppm range
    • Temperature controlled analysis
    • Patent pending
    • Automatic validation of results
    • Seamless Wet Station interface via 4-20mA, RS-232, or TCP/IP protocols
    • Feedback signal for closed-loop control
    • Small footprint
    • Phosphoric acid analysis optional
    • Low CoO

    In Shallow Trench Isolation and Nitride Spacer Etch Back process steps, high temperature Phosphoric Acid is used to remove Silicon Nitride.  In today's industry, with shrinking device topography, loss of Silicon Oxide is unaffordable.  In order to increase etch selectivity of Nitride over Oxide and control the rate of Nitride etch, a specific range of hydrated Silica in the Phosphoric Acid solution must be closely maintained.
    Quali-Surf QSF-500 is designed to accurately measure ppm levels of Silica in hot Phosphoric Acid solutions. This online system provides fast results and interfaces seamlessly with Nitride Wet Etch stations.
    With self-calibration and auto-verification capabilities, absolute accuracy of the analysis is ensured, down to the 10ppm range.
    QSF-500 is the only tool on the market offering automatic, continuous measurement of Silica in Hot Phosphoric Nitride Etchant.

    Specifications

    • Phosphoric Acid: 150-180°C
    • Silicon content:     0-100ppm
    • Accuracy:  ±5ppm
    • Analysis time: <7 minutes/measurement
  • Quali-Surf Wet Process Series
    QualiSurf® is a real-time NIR analyzer for precise monitoring of multiple-component chemistries. The QualiSurf enables users to maintain the concentrations and ratios of chemical components in wet processing solutions,...

  • Features

    • Reports individual concentrations of multiple-component chemistries
    • Superior accuracy and precision
    • Etch rate monitoring capability
    • Multi-channel - capable of controlling multiple different baths
    • Real-time analyses and continuous monitoring of solutions
    • In-line optics probe for incorporation with existing piping of wet processing equipment
    • Feedback signals for automatic closed loop control of the process equipment
    • Minimal PM requirements
    • Built-in temperature compensation
    • Proprietary hardware/software combination eliminates and compensates for bubbles in sampling lines

    QualiSurf® is a real-time NIR analyzer for precise monitoring of multiple-component chemistries. The QualiSurf enables users to maintain the concentrations and ratios of chemical components in wet processing solutions, preventing costly yield losses due to non-optimal chemistry. The same hardware can support numerous challenging applications by using various analytical models, such as: SC1, SC2, SPM, BOE, DHF, Silicon Nitride Etch, DSP+, ST-250, CMP slurries, KOH/IPA, HF/HNO3 and many other chemical mixtures used in the Semiconductor, FPD, LED and Solar industries. The analyzer provides instantaneous results which can be transmitted via closed-loop feedback to any single wafer or batch type cleaning tool, to maintain consistent concentrations and etch rates.

    QualiSurf's flow-through analytical cell is integrated into the solution piping, eliminating cross contamination. Light is transmitted through the solutions and the resulting spectrum is collected by our proprietary detector. A unique ultra-low noise spectrometer combined with ECI's proprietary MVA algorithms allow differentiation of even the slightest concentration change in difficult ambiences such as temperature fluctuations, bubbles, and hot solutions. ECI also designed a high end multiplexer to allow monitoring of up to multiple different channels with a single tool, thus providing significant cost savings for the user.

    Specifications

    Typical Applications:

    • Monitoring consistencies of wet processing/surface preparation solutions as the chemicals age
    • Controlling point-of-use fresh chemical mixtures
    • QualiSurf can be used to predict thin film etch rates of solutions
    • In-line monitoring of particle density in CMP slurries



BEWARE - Special Warning Notice about ExpoGuide and FAIRGuide

With the ongoing solicitations, SEMI would like to continue to alert you with questionable professional practices perpetrated against exhibitors by FairGuide.com (Austria) and Expo Guide (Mexico), Event Fair - The Exhibitors' Guide with their misleading directory services. There may be others that we are not aware of and are hence not named here. 

These companies provide legitimate exhibition guides aimed at exhibitors across the globe offering online listing services. They use a form which resembles and organizer's free catalogue listing service, inviting exhibitors to complete the form for an entry in an on-line directory. Unsuspecting exhibitors who sign and return the form are then contracted into a three-year, non-retractable agreement, which could cost the exhibitor a significant amount of money, with very limited foreseeable benefits. The details are often available on the form itself, but are often too small and insignificant to be noticed. It is always wise to really the small print before signing a contract, and if the information is impossible to read then the contract should not be signed. 

These publications have no connection with SEMI or any of our events, and it is important that all companies are made aware of this. 

Should you receive any communication from the Expo-Guide and Fairguide.com or related company, please IGNORE THEM COMPLETELY and DO NOT COMMUNICATE WITH THEM IN ANY WAY.