엠에이티㈜


http://www.mat.co.kr
  • 부스번호:A338


Gas Abatement System

We put people before profit.

MAT Plus is an environmental company specializes in air pollution prevention technology.
With world-class environmental technologies that have been leading the field for over 25 years, we promise to deliver the best solution with the top quality and service.

 제품정보

  • FCTO700W
    The FCTO is a high temperature catalyst system that combines flameless catalytic thermal oxidation and wet treatment technologh into one syste to abate flammable, water soluble gases and NF3 simultaneously with high efficiency....

    • The FCTO is designed to accommodate a toatl gas flow up to 700, and 2000SLM respectively, depending on mode.

    This system naintains the catalyst zone at a high temperature uniformly by electric heater and waste gas reaction heat without combusion of addtional fuel(LNG), thus;thermal NOx is rarely generated. 

    Powder and water-soluble gases which can be genterated during thermal oxidation will be captured by multi-stage wetting zone.

    In case of PM, cartridge does not open on site and it is replaced and retrieved. Therefore system is maintained and managed conveniently without contamination of FAB.

    A PLC controlled color touch screen will help you access system operation easily.

    FCTO700W is ideal for CVD process(using NF3 as cleaning gas) in semiconductor.

    FCTO2001W is specially designed for AMOLEND process using large amount of powder generating gas and NF3.

Categories

200 Equipment, Assembly
  • Cleaning; Washing Equipment for Assembly & Packaging
    • 202 Equipment, General Use
  • Vacuum drying & out gassing Systems
    • 208 Equipment, Test
  • Environmental Stress Systems - Temperature; Humidity; Pressure; HAST
    • 303 Materials, Gases
  • Other Specialty; Mixed Gas
    • 401 Sub-systems
  • Gas; Liquid delivery panels as subsystems
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Environmental; Utility Systems & Monitoring
  • Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers)
    • 701 Manufacturing Services or Consulting
  • Environmental; Health & Safety and Hazardous Material (HazMat)


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