Designed specifically for the semiconductor and data storage industry, the 2830 ZT Wafer Analyzer enables the determination of layer composition, thickness, dopant levels and surface uniformity for a wide range of wafers up to 300 mm.
Supporting your analysis in:
• Dielectrics: BPSG, PSG, BSG, ASG
• Doped polysilicon
• Barrier films and stacks: Ta, TaN, WCxNy, TiN, Si3N4
• Silicides/salicides: TiSix, CoSix, WSix, NiSix
• Metallization films and stacks: Cu, AlCu, Ti, W, Au, Pt, AuGe, Ag, Sn, etc
• Low-k dielectrics: FSG, SiOF
• High-k dielectrics: HfO2, HfAlOx, Ta2O5, etc
• TMR and GMR related films and stacks: CoFe(B), AlOx, Ru, NiFe, IrMn, CrPtMn, etc
• PRAM and FeRAM films: PZT, SBT, BLT, GeSbTe
• SAW and BAW films and stacks: Al, Cu, AlCu, Ti, Ta, Pt
• SiGe
• Phase change materials: GeSbTe, InSbTe, SeAgGe, GeAsT
Fast and cost-effective multi-layer analysis
• Powerful Fundamental Parameter software
• Analysis of stacks up to 16 layers
• Simultaneous measurement of up to 24 elements
• Intuitive operation
Seamless fab integration
• Efficient, compact system design
• From manual to fully automated wafer loading
• Compliance to all relevant standards
A complete solution
• Excellent tool matching
• Complete support
Unrivalled productivity, reliability and sensitivity of light element performance.
All thanks to our advanced 4 kW SST-mAX X-ray tube, featuring groundbreaking ZETA technology which eliminates the effects of X-ray tube aging – by far the largest contributor to instrument drift. The 2830 ZT maintains these qualities throughout its entire lifetime. Malvern Panalytical is proud to be the only X-ray manufacturer with our own X-ray tube R & D and manufacturing center. That gives our customers an edge in ready supply and clever engineering of our tubes to suit the demands of our instruments.