Features
• 316L stainless steel body
• Metal to metal diaphragm to body seal
• Easy front panel and rear bracket mounting
• Gauge ports are standard with 1/4” face seal male. Internal 1/4” face seal female is also available
• Fully internal electropolished
• Cleaned, assembled and packaged for high purity semiconductor applications
• High-cycle life
• 100% Helium-leak tested
Materials
• Body: 316L stainless steel
• Seat: PCTFE*, Vespel®
• Diaphragm: 316L stainless steel
• Poppet: 304 stainless steel
Functional Performance
• Flow capacity: Cv=0.14
• Maximum leak Rate:
Inboard leakage: 2 x 10-9 atm cc/sec He
Across seat leakage: 4 x 10-8 atm cc/sec He
• Proof pressure: 150% of maximum rated pressure
• Burst pressure: 400% of maximum rated pressure
Operating Conditions
• Maximum inlet pressure: 500 psi (35 bar), 3000 psi (206 bar)
• Outlet pressure: 0 ~ 25 psi (1.7 bar) , 0 ~ 50 psi (3 bar), 0 ~ 100 psi (7 bar), 0 ~ 250 psi (17 bar), 0 ~ 500 psi (35 bar)
• Temperature: -40°F ~ 165°F(-40°C ~ 74°C)
Surface Finish
• Standard Ra: 20 μin
• Optional Ra (EP): 10 μin
Internal Volume
• 4.6 cc