SHiNKO Europe AG

  • Booth: A1127

DRYAIR CLEANING SYSTEM for Surface of Wafer & Flat materials

Overview

SHiNKO has been a leading manufacturer of SURFACE CLEANING SYSTEM for the last 30 years. A wide range of customized cleaning system is available for Web as well as Flat materials and for different sizes & characteristics of particle. The system is free from maintenance and easily installed in the process where the particle removal is critical. Our main markets/ applications are those in relation with Films, Batteries, Display, Wafer, CMOS, Lens, Paper, Card board, Tire, Metal, Foil, Fiber, OLED, Ceramic, Non-woven, Fabric, Leather and so on.


  Products

  • SHiNKO Cleaner process module
    SHiNKO cleaning Process module is a standalone tool to clean wafer or flat substrates.
    The tool Includes a blower unit, FFU, PLC control, communication with EFEM
    ...

  • SHiNKO cleaning Process module is a standalone tool to clean wafer or flat substrates.
    The tool Includes a blower unit, FFU, PLC control, communication with EFEM
  • SHiNKO Dryair cleaner process module + EFEM
    SHiNKO dry cleaning process module is a tool of a complete process module unit including a master control & SECS/GEM
    ...

  • SHiNKO cleaning process module is a tool of a complete process module unit including a master control & SECS/GEM
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