Vacuum systems, including pumps, filters, and other auxiliary equipment are crucial for semiconductor and solar cell manufacturing processes including: crystal growing, wafer fabrication, Chemical Vapor Deposition (CVD), and lamination. These processes create by-products ranging from silicon particles to harsh chemical vapors, and when not captured, these contaminants will negatively impact the overall system performance and damage critical components, including the vacuum pumps.
High-efficiency vacuum filtration solutions that are designed for specific process requirements will maximize Overall Equipment Effectiveness (OEE) by capturing process contaminants, protecting the vacuum pump, reducing maintenance costs, and maximizing semiconductor tool uptime and product yields. Solberg designs and manufactures purpose-built filtration solutions that offer protection for vacuum pumps and process systems.