Overview
UVAT Founded in 2002, is a group of specialists with years of experience in vacuum technology that are constantly engaged themselves in the design and development of Physical Vapor Deposition (PVD), and Dry etching(ICP、RIE、Ion bean、Micro wave).
We keep developing new plasma technology continuously, and also research new field application, thin Film Properties, and hardware development with customer.
UVAT can do comprehensive service including sample provided, Mass Production system planning, EFEM design, and equipment modification for function improvement. Moreover, UVAT own after service team to support Full Service to customer. We also provide sputtering equipment and coating OEM service if necessary.
UVAT’s professional technology cover industry fields icluded 5G communication, PCB, IC Substrate, Semiconductor, IC Package, Tablets NB, Smart Phone, Automobile parts, LED… etc