Genstar Technologies Co., Inc.

Feature:

• Equipped with pressure switches and electronic scale to monitor the gas source in real time and automatically changes-over to provide
an uninterrupted supply of gas
• Automatic purging function to eliminate hazardous gas.
• Ethernet and RS485 communication interface for remote monitoring and alarm. Expandable to dual touch-screen display
• Optional remote monitoring via mobile App or SMS messaging
• Wetted valves and components constructed with stainless 316L or VAR construction with surface finish 10 Ra average or better
• UHP orbital welded tubing and valves with face seal (VCR) connections provides high leak rate integrity
• Equipped with pressure transducer, flow switch, high temperature probe and other parts for real-time monitoring
• Complies to SEMITM S2 Safety Guidelines for Semiconductor Manufacturing Equipment
• The panels are assembled in a class 100 clean room
• Helium lead tested to 1.0×10-9 atm-cc/s

This series of control panels come in a variety of configurations,
ranging from one outlet point to multiple outlet points, as well as one terminal to multiple terminals to meet a wide range of
requirements and applications. Please see ordering information for more options.

Product Features
• Designed for terminal gas control
• Easy-to-read 2” stainless steel pressure gauges
• Single panel configuration for easy installation
• Valves are available in three types: ball valves, diaphragm valves, and needle valves

Features
• DV86 / DV87 series diaphragem valve, U11 / U13 / U21 / U22 series regulator
• Pass Pressure, Helium, Moisture, Oxygen and Particles Testing
• Inlet and outlet connection：1/4”, 1/2” VCR

Materials
• Valve body, Diaphragm：316L Stainless Steel
• Valve Seat：PCTFE, Vespel®

Specifications
• Maximum inlet pressure：500 psi, 250 psi, 150 psi
• Maximum outlet pressure：100 psi, 75 psi, 50 psi
• Operating temperature：-40℃~74℃ (-40℉~165℉)
• Surface finish：Ra 7 μin

This seriesof control panel comes in one or multiple terminals to meet a wide range of requirements and applications.

Product Features
• Designed for terminal gas control
• Easy-to-read 1.5” chrome-plated brass gauges
• Uses BLK 101 Regulator
• Single body minimizes point of leaks and contamination
• Adjustable outlet pressure
• Single panel configuration for easy installation

Specifications
• Maximum inlet pressure: 500 psi
• Maximum outlet pressure: 25, 50, 100, 150 psi
• Operating temperature range: -40 to 165 oF (-40 to 74 oC)
• Leak rate: 2x10-8 atm.cc/sec He
• CV: 0.14

Materials of Construction
• Regulator and valve body: Chrome-plated brass
• Regulator seat: PTFE
• Inlet and outlet connection: 1/8” NPT(F), 1/4” SAE(F)
• Pressure gauge: Chrome-plated brass

Features
• 316L stainless steel body
• Metal to metal diaphragm to body seal
• Easy front panel and rear bracket mounting
• Gauge ports are standard with 1/4” face seal male. Internal 1/4” face seal female is also available
• Fully internal electropolished
• Cleaned, assembled and packaged for high purity semiconductor applications
• High-cycle life
• 100% Helium-leak tested

Materials
• Body: 316L stainless steel
• Seat: PCTFE*, Vespel®
• Diaphragm: 316L stainless steel
• Poppet: 304 stainless steel
 

Functional Performance
• Flow capacity: Cv=0.14
• Maximum leak Rate:
  Inboard leakage: 2 x 10-9 atm cc/sec He
  Across seat leakage: 4 x 10-8 atm cc/sec He
• Proof pressure: 150% of maximum rated pressure
• Burst pressure: 400% of maximum rated pressure

Operating Conditions
• Maximum inlet pressure: 500 psi (35 bar), 3000 psi (206 bar)
• Outlet pressure: 0 ~ 25 psi (1.7 bar) , 0 ~ 50 psi (3 bar), 0 ~ 100 psi (7 bar), 0 ~ 250 psi (17 bar), 0 ~ 500 psi (35 bar)
• Temperature: -40°F ~ 165°F(-40°C ~ 74°C)
 

Surface Finish
• Standard Ra: 20 μin
• Optional Ra (EP): 10 μin
 

Internal Volume
• 4.6 cc
 

Features
• Suitable for high ultra purity applications
• 316L Stainless Steel enhances weldability and resistance to corrosion
• Both manual and pneumatic actuation are available
• Face seal fittings (FSR) or butt weld connections
• Internally spring-less design
• Metal-to-metal seal minimizes particle generation and ensures “purity integrity” in the flow pasages
• 100% Helium-leak tested

Materials
• Body： 316L stainless steel
• Seat： PCTFE, Vespel®
• Diaphragm： Elgiloy®

Specifications
• Cv: 0.3
• Maximum Leak Rate
   Inboard： 1x10-9 atm cc/sec He
   Outboard： 4x10-9 atm cc/sec He
• Proof pressure： 150% of maximum rated pressure
• Burst pressure： 400% of maximum rated pressure
 

Operating Conditions
• Maximum operating pressure：
   3500 psi ( 241 bar) (Manual and Pneumatic)
   300 psi ( 20.7 bar) (Pneumatic)
• Minimum working pressure： Vacuum
• Temperature： -40oC~65oC (40oF~150oF)

Pneumatic Actuator Specifications
• Driving pressure： 70~125 psi
• Inlet connection： 1/8” NPT(F)
• Setting： Normally Closed or Normally Open

Surface Finish
• Standard Ra 10-15 μin
• Option Ra (Ep) 7 μin

Internal Volume
• 3.2CC