Spectron GCS Singapore Pte Ltd

Product features
• Pressure control panel for hazardous gases and
ultra high purity gases from grade 6.0
• SBE: purge- and connection block or
SR: pigtail and single valves with
- manual waste gas valve (HPV)
- pneumatic process gas valve (HPI)
- manual purge gas valve (PGI)
• Check valve to prevent process gas from fl owing
back into the purge gas line
• Pre-fi lter
• Pressure regulator with tied diaphragm
• Burst disc with burst disc monitoring
• Leak test port for leak test or vacuum
• Stainless steel valves for manual or automatic
(pneumatic) shut-off
• Minimized purge volume (SBE)
• Electro-polished surfaces (gas wetted)
• Clearly legible handwheel position indication (on/off )
• 100 % Helium leak tested
• Assembly in clean room class ISO 5.0
• Modular design with many options

Product features

• Pressure control panel for corrosive gases and gas mixtures with corrosive components from grade 6.0

• Automatic switchover for 2 gas sources

• Single- or dual-stage version

• High control accuracy

• Pressure regulator with tied diaphragm

• Orbital welded VCR-connections

• Pre-fi lter • Panel can be evacuated

• Burst disc

• High pressure waste gas valve (HPV)

• Inlet process gas valve (HPI)

• Stainless steel valves for manual or automatic (pneumatic) shut-off

• 100 % Helium leak tested

• Assembly in clean room class ISO 5.0

Product features

• Point of use stick for corrosive gases and gas mixtures with corrosive components from grade 6.0

• High control accuracy

• Pressure regulator with tied diaphragm

• Orbital welded VCR-connections

• Point of use can be evacuated

• Manual or pneumatic valve options:

  - process gas inlet (TPI)

  - purge gas inlet (SPI)

  - purge gas vent (SPV)

  - process gas outlet (TPO)

• 100 % Helium leak tested

• Assembly in clean room class ISO 5.0

Product features

. For corrosive, toxic gases and ultra high purity gases
· Complete system solution with SEMI S2 standard
· Integrated PLC control system Flo Control
· Customized according to user requirements
· 10 inch high-resolution touch screen
· Multi level password protection
· Continuous monitoring system for important data
· Automatically make security measures based on
  monitoring data
· Multiple sets of gas supply panels can be monitored
  simultaneously as needed

Product features

• Pressure regulator for hazardous gases and ultra high purity gases from grade 6.0

• Single-stage regulator with anti vibration device

• Pressure regulator can be evacuated

• High control accuracy

• Metal-to-metal seal to atmosphere

• High surface quality

• Tied diaphragm

• Minimized internal volume for short purge times

• Electro-polished surfaces (gas wetted)

• Simple outlet pressure limitation by handwheel

• 100 % Helium leak tested

• Assembly in clean room class ISO 5.0 

Product features

• Pressure regulator for hazardous gases and ultra high purity gases from grade 6.0

• 1-stage or 2-stage version available

• Pressure regulator can be evacuated

• High control accuracy

• Metal-to-metal seal to atmosphere

• High surface quality

• Tied diaphragm

• Minimized internal volume for short purge times

• Electro-polished surfaces (gas wetted)

• Simple outlet pressure limitation by handwheel

• 100 % Helium leak tested

• Assembly in clean room class ISO 5.0