Advanced Thermal Sciences Taiwan Corp.

Hsinchu County, 
Taiwan
  • Booth: N980
  • - 4th Floor

ATS is a leader of heat exchange chiller manufacturer in the world.

We manufacture HEX and chillers with a operating range from -70degC~200degC.

The main application of our products specialize in main Etcher system AMT, Lam, TEL, Mattson, Hitachi, and KE etc.

Our system provide stable temperature control of +/-1 degC for wafer manufacturing process.

We lead in service and repair for all chillers in the industry.

We specialize in sales for Galden a heat transfer fluid for semiconductor.

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