Atmospheric Processes
Diffusion (drive-in) high temperature procesess
Doping from solid, liquid and gaseous dopant sources e.g.: BBr3, B2H6, POCL3, PH3, BN
Various thermal processing e.g. annealing, sintering
Pyrogenic Wet Oxide with External Burning System
Wet Oxide with ultra pure steamer
Dry Oxide HiPOx (High Pressure Oxide)
LPCVD Processes
Silicon nitride
Low temperature oxide (LTO)
High temperature oxide (HTO)
TEOS oxide Polysilicon, with tilt/flat temperature profile
Doped polysilicon
Oxynitride
PECVD Processes
Silicon nitride (incl. anti-reflective SiN solar cell coating)
Silicon oxide
Oxinitride