Mask / Reticle
Mask Dry Etcher, CD / Overlay Metrology, E-beam Writer, Reticle Cassette
Lithography Process
Stepper, Coater / Developer, Curing Furnace, Mercury Lamp
Etch Process
Dry Etch, Plasma Cleaning / Descum, End Point Detection
Thin Film & Thermal Process
High Pressure Gas Anneal and Oxidation Furnace, Electro-Plating System, PECVD, CVD, Pulsed Laser Deposition, RTP
Metrology & Inspection
Optical / Stylus Profiler, Standards, AFM, 3D X-Ray Microscopy, Laser Marker, Isolation Systems, Stress Meter, Nanoindenter
Sub-Systems & Others
Power Supply, RF Generator, Robot, EFEM, Pressure Sensor, Valves, Metal Cassette, Magazine, KVM
Flat Panel Display
Dry Etch, PECVD, Annealing Furnace, PI Curing Furnace, PVD, Mask / Cassette Cleaner, Optical / Stylus Profiler, AP Plasma Clean
Battery
Cell Stacking, Degas, X-ray inspection, Secondary Battery Cell Automation Production Tools
Analytical Inst.
Particle Sizer, Pre-Treatment, Element Analyzer