亞太國際電子器材代理:
Denton Vacuum
實現薄膜沉積和蝕刻的創新
憑藉在蒸發、濺射、PE-CVD、離子束沉積、故障分析等方面的專業知識，Denton Vacuum 支持半導體、光電、顯示器、顯微鏡、微量分析和納米工程市場不斷變化的需求。 50 多年來，一直是薄膜行業的先驅，以高質量的解決方案和客戶服務幫助工程師解決他們的產品開發和生產挑戰。從基礎研究到製造，薄膜沉積和蝕刻技術可靠地提供一致、可重複的結果。 Denton Vacuum 是唯一一家大到足以提供標準平台和專有子系統的供應商，但又小到可以提供根據您的需求定制的解決方案。 了解我們的解決方案如何解決您的挑戰。
最新推出的Infinity Ion Beam Sputtering Systems離子束濺射系統
Infinity IBS 系統提供緻密、無缺陷的薄膜，具有極高的精度和厚度均勻性。 它提供對離子能量的獨立控制，因此可以獲得精確的薄膜規格，如因剝落其造成的污染也非常低。
偏置靶濺射模組提供對薄膜介面的出色控制，提供對離子電流和能量的獨立控制，並在低壓下運行。 這消除了光束溢出造成的污染和散射，防止表面損壞，實現嚴格的應力控制，並形成緻密、無缺陷的薄膜。
BTS 模組通過增加目標使用率來提高擁有成本，從而能夠減小總體目標大小。 該系統設計使得無需旋轉即可在大型基板上實現出色的均勻性。 與其他 IBD 平臺相比，提供脈衝濺射和更高的沉積速率。
Denton Vacuum
ENABLING INNOVATION IN THIN FILM DEPOSITION AND ETCH
With expertise in evaporation, sputtering, PE-CVD, ion beam deposition, failure analysis and more, Denton Vacuum supports the evolving needs of the semiconductor, opto-electronics, display, microscopy, microanalysis and nanoengineering markets. For over 50 years, we have pioneered the thin film industry, helping engineers solve their product development and production challenges with high-quality solutions and unparalleled customer service.
From basic research to manufacturing, our thin film deposition and etch technologies reliably deliver consistent, repeatable results. Denton Vacuum is the only supplier that is big enough to offer standard platforms and proprietary subsystems, yet small enough to offer solutions customized to your needs. Discover how our solutions can solve your challenges.
Infinity Ion Beam Sputtering Systems
The Infinity IBS System delivers dense, defect-free films with extremely high precision and thickness uniformity. It offers independent control over ion energies, so you can achieve exacting thin film specs with very low contamination from flaking.
New Launch,the Bias Target Sputter module offers excellent control of thin film interfaces, provides independent control over ion currents and energies, and operates at a low pressure. This eliminates contamination and scatter from beam overspill, prevents surface damage, enables tight stress control, and creates dense, defect-free films.
The BTS module improves cost of ownership with increased target usage that allows you to reduce the overall target size. The system design makes it possible to achieve excellent uniformity on large substrates without rotation. The module offers pulsed sputtering and a higher deposition rate compared to other IBD platforms.