永純應用材料股份有限公司

竹南鎮,  苗栗縣 
Taiwan
http://www.epam.com.tw
  • Booth: L0225
  • - 4th Floor


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EPAM is a professional filter manufacturer. We offer various depth/ pleated/ capsule cartridges, and SUS/ PP/ PFA housing for customers in microelectronics, food and beverages, chemicals, and medicals.

Our filters by using a variety of materials such as PP/ UHMWPE/ PES/ PTFE/ PVDF/NYLON membranes and nanofibers. EPAM provides completed product categories to fulfill customers' needs.

EPAM's filters are widely used in the CMP, Etching, Plating, and lithography process of microelectronics. In order to fulfill the responsibility of ESG, EPAM is the first filter maker to offer the regeneration service to all fluoropolymer filters.

EPAM always acts as a partner to clients by timely delivery to reduce clients' inventory, and strong technical support to assist clients' troubleshooting. Welcome to contact EPAM if any requirements about filtrations.

 Products

  • Filter Regeneration Service
    EPAM offers the filter regeneration service to all fluoropolymer cartridges and disposable filters....

    • Applications:

    • EPAM offers the regeneration service to all cartridges type and disposable types of all fluoropolymer filters, which are used in SC1, SC2, SPM, BOF, and the other critical etching process. 

    Advantages:

    • Quality of regenerative filter approaching new filter. 
    • Meet ESG requirements and reduce operation cost
  • Terepure Slurry Filters
    EPAM offers 100nm to 15um cartridges and capsule filters for slurry filtration in CMP....

    • Applications:

    • Slurry filtration
    • Plating filtration
    • Inkjet filtration

    Advantages:

    • High particle holding capacity
    • Gradient nanofibers
    • Compatible with current manifold
  • Ionexplus Purifier
    Ionexplus Purifier Series is designed to remove metal ions from water or organic solvents. The filter media provides a huge contact surface for the ion exchange group to remove even low-level metal ions in the liquid....

    • Applications:

    • Water hardness removal
    • Metal ion removal from UPW/DIW
    • Metal ion removal from wastewater
    • Chemical regeneration and purification

    Advantages:

    • Excellent metal removal efficiency
    • High ion exchange capacity
    • PP structure for high-temperature
    • Regenerable
  • All Fluoro Filters
    EPAM All Fluoro Series is a highly chemically-resistance cartridge owning to its PTFE membrane and PFA support material and PFA components....

    • Applications:

    • Filtration of stronger acid and base solutions, solvents, and DI-water under high temperature, which is used in wet etching, solvents stripping, and cleaning processes

    ​Advantages:

    • All-fluoropolymer construction
    • Excellent compatibility and high-temperature capability
    • EPAMlock key is optional

Categories

400 Components, Parts & Accessories
  • Filters for Liquid; Oil
  • Filters, Getters, Purifiers, Catalysts for Gases
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