A . High Eff. Epoxy Molded Sync. Motor (PMAC)
Better efficiency
1) by eliminating sealing-can between rotator and stator
2) by using permanent magnet rotator
B. Oil lubricated Ceramic bearings
Enhanced durability
C. Hybrid Screw
Low power consumption
Miniaturization
D. Applying Lip seal
Preventing influx of process gas into oil chamber
Preventing oil contamination à Bearing life time ↑
E. Less noise, Less vibration
Direct connection of motor and rotor with stabilized
both-ends-supporting structure
F. Inverter Control
Pumping speed(=RPM) control based on process condition
Idle mode
A . High Eff. Epoxy Molded Sync. Motor (PMAC)
Better efficiency
1) by eliminating sealing-can between rotator and stator
2) by using permanent magnet rotator
B. Oil lubricated Ceramic bearings
Enhanced durability
C. Hybrid Screw
Low power consumption
Miniaturization
D. Applying Lip seal
Preventing influx of process gas into oil chamber
Preventing oil contamination à Bearing life time ↑
E. Less noise, Less vibration
Direct connection of motor and rotor with stabilized
both-ends-supporting structure
F. Inverter Control
Pumping speed(=RPM) control based on process condition Idle mode