• Easy to operate purge and vacuum circuits
• Wetted materials made of 316L stainless steel and electronically polished
• Equipped with a pressure sensor to monitor abnormal pressure
• Filters are installed in each branch to ensure the purity of the gas
• Each branch can be purged and maintained independently without affecting the air supply of other branches
• Valve components meet SEMI material specification requirements for ultra-high-purity systems
• The panels are welded, assembled and tested in a class 100 clean room to ensure the cleanliness of the system
• Each product has undergone strict factory testing to ensure product cleanliness and leak rate integrity