KT FFKM是一種新型全氟橡膠,具出色的耐熱性、較低的壓縮變形量,且在極端溫度下增強密封性的維持度,KT FFKM適用溫度範圍介於-10℃至315℃。因著出色的耐熱性,它還可以在各種介質中提供廣泛的耐化學性,包括酸、腐蝕劑、酮、醛、酯、醚、醇、溶劑、酸性氣體與碳氫化合物。這種耐熱性與耐化學性的獨特組合使KT FFKM成為半導體相關產業首選的密封材料。同時,它的清潔度(低金屬離子含量和低可析出物)以及卓越的耐熱性與耐電漿性,使其成為一非常適合用於半導體製造業中乾製程與高溫製程(乾蝕刻、PECVD、LPCVD、CVD、PVD、ALD、RTP)所使用之密封材料。
KT FFKM主要用於製造任何類型的彈性密封件,例如O型環、墊片、法蘭墊片等,可用於機械密封、壓縮機、閥件、接頭、半導體產業廠務端及生產設備上。長時間接觸化學品而導致的膨脹和彈性恢復不良是密封失效的常見原因。由 FFKM材質製成的密封件的特性降低了晶圓產量損失,同時降低了保養和運轉中斷的頻率。
KT FFKM is a new perfluoroelastomer offering outstanding thermal resistance, lower compression set and enhanced sealing-force retention at extreme temperature. It is suitable for most applications at temperature ranging from -10 to 315 ℃. Along with excellent thermal resistance, KT FFKM can offer broad chemical resistance in a wide variety of media, including acids, caustics, ketones, aldehydes, esters, ethers, alcohols, solvents, sour gases and hydrocarbons. This unique combination of thermal and chemical resistance makes KT FFKM the sealing material of the best choice for semiconductor manufacturing industries.
Besides, its extreme cleanliness (low metal ion content with low extractables), superior thermal stability and plasma resistance, making KT FFKM a very suitable sealing material for dry (etching, PECVD, LPCVD, PVD, ALD, plasma cleans) and high temperature thermal processes in semiconductor manufacturing industry. The primary use of KT FFKM is manufacture of any kind of elastomeric sealing elements such as O-rings, gaskets and flanges. These sealing elements can be used in mechanical seals, compressors, valves, connectors, factories in semiconductor industry and manufacturing equipment.
Swelling due to prolonged chemical exposure and poor elastic recovery are frequent causes of seal failure. The reliability of seals made of FFKM results in reduced wafer yield loses and lowered frequency of maintenance and operations disruptions.