Feature
・VI Source Measure Modules Structure
・1.2 kV / 130 A (up to 2.2 kV / 200 A ) measurement capability
・High Speed Measurement
・Multi-device test (Simultaneous measurement of 2-in-1 device such as Dual Gate FET2)
・Wafer parallel test (2-chip simultaneous measurement)
・On-Screen Waveform Monitor
・Conventional High Current Unit and High Voltage Unit of TESEC are applicable.