GENTEC

Regulators are hand adjustable, pressure reducing regulators for applications ranging
from non-corrosive, corrosive, and toxic gases. Our metal-to-metal diaphragm to body seal is designed to minimize
leakage and to provide excellent accuracy and longevity.

•   316L stainless steel body
•   Metal to metal diaphragm to body seal
•   Easy front panel and rear bracket mounting
•   Gauge ports are standard with 1/4” face seal male.
    Internal 1/4” face seal female is also available
•   Fully internal electropolished
•   Cleaned, assembled and packaged for high purity
    semiconductor applications
•   High-cycle life
•   100% Helium-leak tested

Features
•   Suitable for high ultra purity applications
•   316L Stainless Steel enhances weldability and
    resistance to corrosion
•   Both manual and pneumatic actuation are available
•   Face seal fittings (FSR) or butt weld connections
•   Internally springless
•   Designed for very low particle generation
•   Metal-to-metal diaphragm seals
•   High-cycle life
•   1/4 turn of the handle to operate from fully open to
    closed / Indicator Window
•   Closed and open indication window
•   100% Helium-leak tested

Materials

• Body: 316L stainless steel
• Seat: PCTFE*, Vespel®
• Diaphragm: Elgiloy®

From one cylinder configuration to multiple cylinders, the SGC can be custom-tailored to meet customer demands.Multiple cylinder systems have a built-in auto-changeover design to ensure a continuous supply of gas. Each SGC UHP Gas Rack features a (HMI) touch screen for real-time monitoring, alarms, and data recording.

Equipped with pressure switches and electronic scale to monitor the gas source in real time and automatically changes-over to provide an uninterrupted supply of gas 

•  Automatic purging function to eliminate hazardous gas.
•  Ethernet and RS485 communication interface for remote monitoring and alarm. Expandable to dual touch-screen display
•  Optional remote monitoring via mobile App or SMS messaging
•  Wetted valves and components constructed with stainless 316L or VAR construction with surface finish 10 Ra average or better
•  UHP orbital welded tubing and valves with face seal (VCR) connections provides high leak rate integrity
•  Equipped with pressure transducer, flow switch, high temperature probe and other parts for real-time monitoring
•  Complies to SEMITM S2 Safety Guidelines for Semiconductor Manufacturing Equipment 
•  The panels are assembled in a class 100 clean room
•  Helium lead tested to 1.0×10-9 atm-cc/s

•  Easy to operate purge and vacuum circuits 
•  Wetted materials made of 316L stainless steel and electronically polished
•  Equipped with a pressure sensor to monitor abnormal pressure
•  Filters are installed in each branch to ensure the purity of the gas
•  Each branch can be purged and maintained independently without affecting the air supply of other branches
•  Valve components meet SEMI material specification requirements for ultra-high-purity systems
•  The panels are welded, assembled and tested in a class 100 clean room to ensure the cleanliness of the system
•  Each product has undergone strict factory testing to ensure product cleanliness and leak rate integrity

GENTEC® FSR fittings areavailabe in 316, 316L, or 316 VAR and supplied in BA or EP grade. Fittings are cleaned, bagged individually in nylon bags, and heat-sealed. 

GENTEC® weld fittings offer high integrity Con-nections in ultra high purity systems. GENTEC® weld fittings also provide compact designs for use with orbital weld equipment. The stainless steel weld fittings feature special machining and surface enhancement to prevent outgassing and inhibit corrosion.

Industries are choosing modular gas delivery systems for obvious advantages over conventional gas systems:
• Smaller size- allowing greater flexibility in deployment and less space in manufacturing facilities. Shorter gas paths- reducing thetime needed to purge gas lines.
• Greater configurability - providing customizable connectionsand easy, last-minute reconfiguration. • Simpler maintenance- offering quickerdisassembly formaintenance and upgrades.
• Custom configurations and application support are available upon request.