Chuck Table Product Features
High precision and good stability—parallelism ≤ 3u(12 inches and less)
Good ventilation—The pressure difference in 10x10mm area can reach ± 3Kpa
High hardness and good durability—The hardness reaches above grade Y
Equipment models that can be matched
Grinding/Back Thinning—All series of Disco,German G&N, Okamoto, Accretech and Korean AM
Dicing—All series of Disco, ADT and TSK
Groove/Chamfer— TSK VGM4000/5000/6000 series; Daitron EMPEC-200 series