Pfeiffer Vacuum Inc.

24 Trafalgar Sq
Nashua,  NH  03063-1988

United States
http://www.pfeiffer-vacuum.com
  • Booth: 1716


Visit us at booth 1716 for perfect vacuum solutions!

Pfeiffer Vacuum provides advanced vacuum technology, high quality and comprehensive vacuum solutions, as well as first-class service.

As the inventor of the turbopump, we pioneered innovation and progress in the vacuum industry. Thanks to close collaboration with our customers and our continued focus on their needs, we constantly optimize and expand our product line.  

Our product line includes turbopumps, dry pumps, and measurement equipment for the following applications: PVD, CVD, lithography, etch and implant processes as well as for back end applications. For inspection and metrology applications, we offer low vibration vacuum solutions. Additionally, Pfeiffer Vacuum offers leak detectors and solutions for Airborne Contamination Management (AMC).

Pfeiffer Vacuum has over 2,350 employees worldwide and more than 20 subsidiaries.  The corporation is listed on the German TecDAX stock index.

 


 Press Releases

  • With the HiPace 2800 IT, Pfeiffer Vacuum presents a turbopump especially dedicated for ion implantation applications. The sophisticated rotor design of the turbopump results in an optimized pumping speed for light gases. This ensures very good process adaption for ion implantation processes, were hydrogen is the most accumulating gas. With 2,750 l/s pumping speed for hydrogen the new HiPace 2800 IT is the best turbopump in its class.

    The intelligent temperature management system prevents process condensation and deposition inside the pumping system. It allows setting the temperature individually to ideally support the process. The special coating of the rotor ensures robustness against all ion implantation process materials. Being based on a so-called hybrid bearing, a combination of ceramic ball bearings on the fore-vacuum side and permanently magnetic radial bearings on the high vacuum side, these HiPace turbopumps have a particularly robust bearing design. Together with the efficient coating, this forms the basis for the long life cycle and maximum up-time of the pumps.

     

     

     

     

     

     

     

  • The ATH-M pumps offer a gas throughput of over 5,000 sccm of nitrogen for non-heated applications. They also allow a very high throughput with up to 1,500 sccm of argon and a pump operating temperature of 65 °C in corrosive applications. The pumps operate at high temperatures up to 85 °C for use in the most aggressive applications with by-product deposition sensitive processes. These pumps include integrated drive electronics to ensure a small footprint and easy plug-and-play installation. The total height of the DN 320 flange model is less than 400 mm. Due to the new electronics; the pumps can be started and stopped within 8 minutes. Active magnetically levitated bearings and automatic out-of-balance compensation enable wear-free and low vibration operation of the ATH-M pumps. They are maintenance-free and require no lubrication. Continuous rotor stability is assured for reliable performance. Low power consumption at nominal speed and very low cooling water consumption (1 l/min) also characterize the new ATH-M pumps.


 Products

  • ASM 380- High performance, mobile leak detector
    The ASM 380 is a mobile, high-performance leak detector optimized for rapid pump down and short response times for large test objects. Ideally suited for maintenance of large objects such as process chambers in the semiconductor industry....

  • The mobile leak detector ASM 380: fast, strong, compact

    The mobile high-performance leak detector is optimized for rapid pump down and short response times for large test objects. It is the ideal leak detector for maintenance of large objects such as process chambers in the semiconductor and photovoltaics industry. With this leak detector, you will achieve extremely short pump down times where large volumes are involved. The slim design and compact size set up on a cart with large wheels and a low center of gravity make the ASM 380 mobile and safe to handle.

  • A4 Series Dry Pumps
    The dry, multi-stage Roots pumps in the A4 series provide pumping speeds of 100 to 2,300 m3/h (58.9 to 1353.7 cfm). These energy-efficient and reliable pumps are ideal for use in demanding processes in the semiconductor and coating industries....

  • A4 series of dry pumps

    The dry multi-stage Roots pumps in the A4 series provide pumping speeds of 100 to 2,300 m3/h (58.9 to 1353.7 cfm). These energy-efficient and reliable pumps are ideal for use in demanding processes in the semiconductor and coating industries. With corrosion resistant materials and a high gas throughput, this pump series is optimally suited for use in CVD processes, for example.

  • ATH-M Series Magnetically Levitated Turbopumps
    The ATH-M series magnetically levitated turbopumps consists of a 5-axis active magnetic bearing which monitors the position of the rotor. This high-quality bearing technology combines long-term stability and reliability with extremely quiet operation....

  • ATH 2804 M and ATH 3204 M magnetically levitated turbopumps

    In the magnetically levitated turbopump in the ATH-M series, a 5-axis active magnetic bearing monitors the position of the rotor. This high-quality bearing technology combines long-term stability and reliability with extremely quiet operation. Given the process equipment of these high vacuum pumps and their exceptional pumping speed, they are ideal for use in semiconductor production, particularly in etching processes, as well as in many other industrial applications.


 Additional Info

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New Products:
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Displaying Equipment:
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