H-Square’s semi-automatic RSP150 reticle SMIF pod
opener provides easy access to photomask storage POD
cassettes used on ASML, Cannon and other mask aligners.
Th e SMIFPO1-6 tool is compatible with all standard
single and multistack RSP150 and MSP150 SMIF
pod designs from Entegris, ASYST, Microtome and
Smooth pod opening mechanism and lift travel Z-axis
are designed for reliability and cleanliness. In this newer
design, the opening mechanism platform travels with
the lid assembly to provide for higher accuracy and less
stress on the spring mechanism. Th e tool is designed
to be Class 1 cleanroom compatible and is ESD safe in
Th e SMIFPO1-6 opener features a mask protrusion sensor.
When a multi-stack pod is being used, the tool will
detect and prevent the lid from closing if a mask is not
fully seated in the internal cassette.
Th ere are no pitch points on the tool opening/closing
mechanism, however, if required H-Square has an optional
side sheild kit availble which can be quoted upon