H-Square Corporation

3100 Patrick Henry Drive
Santa Clara,  CA  95054

United States
  • Booth: 1805

H-Square is a full-service designer, manufacturer and supplier of precision engineered products for the safe handling of semiconductor and electronic devices. Our standard and customized products include: wafer sorting systems, mass transfer systems, metal process cassettes, plastic process cassettes and storage boxes, vacuum wands, wafer aligners, mask handling tools, wafer presenters, edge-grip handling tools, and die and package handling tools. Since 1975, H-Square has been a major producer of high-quality customized handling tools for the IC, compound semiconductor, MEMS, optoelectronic, hard disk, solar cell, and FPD industries.

 Press Releases

  • Contact: Brett Hofmann H-Square Corporation (408) 982-9108 x 106 bhofmann@h-square.com www.h-square.com FOR IMMEDIATE RELEASE Instant Cleanrooms July 12, 2016 San Francisco CA. H-Square introduces instant cleanrooms at Semicon West. The portable KOACH system produces ISO class 1 cleanroom work space in one minute or less in virtually any environment. No need to wait hours, days or weeks to have a clean workspace. Portability makes the systems ideal for labs, pilot lines or even in cleanrooms where less particle contamination is desired. Requiring only standard 120v power, these units use 70% less overall energy than conventional cleanrooms. Only maintenance needed is an annual filter replacement. The patented FERENA filter is one of the system’s key elements. The KOACH system is available in models ranging from T500 tabletop and C900 workbench to large modular cleanrooms. A workbench model will be demonstrated at Semicon West. H-Square is the leading manufacturer of wafer handling and automation tools since 1975. H-Square Corporation, 3100 Patrick Henry Dr., Santa Clara, CA 95054 USA. Telephone (408) 982-9108. www.h-square.com. Booth #: 1805



  • Instant ISO Class 1 Cleanroom
    The portable KOACH system produces ISO class 1 cleanroom work space in one minute or less in virtually any environment....

  • No more waiting hours, days or weeks to have a clean work space. The portable KOACH system produces ISO Class 1 workspace in one minute or less. Ideal for labs, pilot lines or in cleanrooms where cleaner environments are need.  The patented FERENA filter is the key element of the system. Tabletop, workbench and larger modular models are available. Power required is only standard 120 volts. See demonstration at booth 1805.
  • H-Square's Automatic Wafer Mover2 (AWM2)
    AWM is a automation tool which will transfer single wafers - between two cassettes - or- wafers within the same cassette. AWMs will reduce or eliminate the need for a vacuum wand, tweezers, or operator hands to move wafers in semiconductor fabs....

  • H-Square's AWM is available in models to accommodate all wafer sizes. The price is much lower than a traditional wafer sorter and in many applications will eliminate the need for an expensive sorter.
  • Semi-automatic RSP150 opener
    SMIFPO1-6 is a class 1, ESD safe reticle pod opener for all semi-standard RSPs. POD in place sensors and mask protrusion sensor provides safe operation....

  • https://www.youtube.com/watch?v=1Au1eOHo0x8


    H-Square’s semi-automatic RSP150 reticle SMIF pod
    opener provides easy access to photomask storage POD
    cassettes used on ASML, Cannon and other mask aligners.
    Th e SMIFPO1-6 tool is compatible with all standard
    single and multistack RSP150 and MSP150 SMIF
    pod designs from Entegris, ASYST, Microtome and
    other manufacturers.
    Smooth pod opening mechanism and lift travel Z-axis
    are designed for reliability and cleanliness. In this newer
    design, the opening mechanism platform travels with
    the lid assembly to provide for higher accuracy and less
    stress on the spring mechanism. Th e tool is designed
    to be Class 1 cleanroom compatible and is ESD safe in
    Th e SMIFPO1-6 opener features a mask protrusion sensor.
    When a multi-stack pod is being used, the tool will
    detect and prevent the lid from closing if a mask is not
    fully seated in the internal cassette.
    Th ere are no pitch points on the tool opening/closing
    mechanism, however, if required H-Square has an optional
    side sheild kit availble which can be quoted upon

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