Axus Technology

7001 W. Erie Street
Suite 1
Chandler,  AZ  85226

United States
http://www.axustech.com
  • Booth: 2305

Axus Technology provides surface processing solutions for a range of semiconductor, MEMS, substrate, and related technologies. With a highly experienced engineering team, Axus Technology applies proven process technology to the production and development of CMP processes, advanced substrate development, and advanced packaging applications including 3-D integration and through-silicon-via processes. Along with providing support services for existing tools, Axus Technology delivers economical leading-edge equipment and process solutions that are precisely configured for end-user applications. Based in Chandler, Arizona, Axus Technology operations include a fully-equipped development and CMP foundry processing facility, as well as design, manufacture, and worldwide service operations. For more information visit our website at www.AxusTech.com.


 Press Releases

  • Chandler, AZ -- June 2, 2016 - Axus Technology, is pleased to offer the Gemini-2 Dual Slurry Delivery System. This innovative system delivers a continuous supply of two precisely controlled CMP slurries in an exceptionally compact and economical package. The system was developed and delivered under an exclusive customer contract and has been in service for more than five years. Axus is now able to offer this system to other users for a broad range of production and development applications, anywhere where the efficient use of space and slurry are important.

    The Axus Gemini-2 slurry delivery system provides continuous delivery and mixing of two slurries, utilizing a pair of mix and delivery tanks for each slurry.  When used for continuous dispense, slurry dispenses from one tank while new slurry is prepared in the second tank.  Dispense and mix alternates between tanks continuously, allowing for uninterrupted on-demand slurry delivery.  This twinned-tank arrangement eliminates the need to mix large batches of slurry and reduces concerns about pot-life and chemical management of stored slurry. Eliminating the use of a day-tank for slurry storage also allows for an exceptionally compact footprint.  

    The Gemini-2 delivers two slurries with a footprint that is a small fraction of what a typical single slurry delivery system requires. Occupying less than six square feet, and with its two sets of twinned tanks, the system includes all of the needed slurry management features, including slurry humidification, nitrogen backfill and automated clean and purge capability. Along with being simple to maintain, the system design supports rapid clean and changeover of slurry types.

    "With the system in service for more than five years, the Gemini-2 systems have demonstrated their reliability and consistent performance," stated Dan Trojan, VP of Engineering at Axus Technology.  "We're delighted to now be able to offer these systems to all users.  The Gemini-2 delivers two slurries and is priced less than a single-slurry automated delivery system. For many sites it's the perfect solution: a small foot-print system that delivers savings in both capital investment and slurry cost."
  • Chandler, AZ -- June 16, 2016 - Axus Technology of Chandler, Arizona is pleased to introduce the G&P POLI-1300PCB Planarization Tool for large format substrates greater than 500mm on a side.  The POLI-1300PCB was developed to address the growing requirement for inter-layer planarization of dielectric, epoxy, and metal films on large format substrates, including fan-out boards and similar products.

    The tool includes automated process controls and the large format carrier and platen needed to planarize these large substrates. The temperature-controlled platen also supports through-the-table slurry delivery, ensuring efficient delivery and slurry usage.

    The POLI-1300PCB is manufactured by G&P Technology in Korea and distributed in North America by Axus Technology. Process demonstrations are available in Axus' Chandler, AZ facility.  

    "Where we have previously custom-configured CMP tools for large substrate applications, the G&P POLI-1300PCB is specifically designed for the application, making it a much more efficient platform," says Dr. Peter Wrschka, Axus Technology's Director of Process Technology.  "The POLI-1300PCB builds on well-established methods of CMP process technology adapted to deliver improved uniformity and repeatability for these large substrates.”
  • Chandler, AZ -- June 23, 2016 - Axus Technology has been selected by Trusval Technology as the exclusive distributor for the Trusval CO2-DI Water delivery system in North America and Europe. Used for wet cleaning applications, the Trusval CO2-DIW provides high purity DI water that is also conductive, eliminating ESD risk in wet cleaning and grinding applications, where SOI and other devices might otherwise be prone to damage.  

    Much more efficient than membrane-based technology or CO2 bubbling, a single Trusval CO2-DIW system can deliver up to 80 liters per minute of conductive CO2 charged water for use in critical wet process steps where the stability of the water conductivity is critical.  For certain process steps the CO2-charged water has proven to be an effective replacement for NMP, while also delivering improved process performance. 

    The system relies on a CO2 concentration technology that is 100% efficient in the use of CO2 and DI water inputs, delivering exceptionally consistent water at a high volume.

    First shipments of the Trusval CO2-DIW system for Taiwan and Asia began in 2015, and in association with Axus Technology, is now sold and supported worldwide. Axus is pleased to be exhibiting this tool at the upcoming Semicon West 2016 conference in San Francisco.  The tool and representatives from both Axus Technology and Trusval Technology will be at the Moscone Center, Booth 2305 in the South Hall. 

    "We are pleased to be working with Axus Technology," said Trusval Technology president, Eric Chien.  "While Trusval has established a strong customer base in Taiwan and Asia, Axus Technology has the technical capability and engineering expertise needed to support our North American and European customers.  Axus has a strong history in supporting process development work and will help us apply the Trusval CO2-DIW system in both proven applications and new processes."

 Products

  • G&P Technology POLI-1300PCB
    The G&P Technology POLI-1300PCB planarization tool is specifically designed for use in processing large format multilayer panels and uses a large format carrier designed for use with rectangular substrates up to 530mm on a side....

  • The rigid design of both the direct drive carrier and tool, coupled with efficient through-the-table slurry delivery, provides for efficient planarization with exceptional process uniformity, with standard within-substrate uniformity results of less than 8%.

    Tool Specifications:  

    • Platen Diameter: 1016 mm (40 inch), Anodized Aluminum
    • Platen Rotation Speed, 30 – 120 RPM
    • Platen Temperature Control Capable (chiller not included)
    • Carrier Diameter: 762 mm (30 inch)
    • Carrier Rotation Speed: 30 – 120 rpm
    • Downforce Control, variable air pressure : 1psi-7psi for 410x510 mm PCB Size
    • Conditioner Type: Swing-Arm Brush Conditioner
    • Touch screen PLC control system
    • Process Format: Automated Control, Dry-in/Wet-out
    • Tool Dimensions: 2100W 2200D 2000H mm
  • Trusval CO2-DI Water Delivery System
    The Trusval Technology CO2 DI Water Delivery System provides high purity DI water that is also conductive, eliminating ESD risk in wet cleaning and grinding applications....

  • The Trusval Technology CO2 DI Water Delivery System is used for wet cleaning applications and provides high purity DI water that is also conductive, eliminating ESD risk in wet cleaning and grinding applications, where SOI and other devices might otherwise be prone to damage.  

    Much more efficient than membrane-based technology or CO2 bubbling, a single Trusval CO2-DIW system can deliver up to 80 liters per minute of conductive CO2 charged water for use in critical wet process steps where the stability of the water conductivity is critical.  For certain process steps the CO2-charged water has proven to be an effective replacement for NMP, while also delivering improved process performance. 

    The system relies on a CO2 concentration technology that is 100% efficient in the use of CO2 and DI water inputs, delivering exceptionally consistent water at a high volumes.

  • Gemini-2 Dual Slurry Delivery System
    The Axus Technology Gemini-2 Dual Slurry Delivery System delivers a continuous supply of two precisely controlled CMP slurries in an exceptionally compact and economical package....

  • The Axus Gemini-2 is well-suited for a broad range of production and development applications, anywhere where the efficient use of space and slurry are important.

    The Axus Gemini-2 slurry delivery system provides continuous delivery and mixing of two slurries, utilizing a pair of mix and delivery tanks for each slurry.  When used for continuous dispense, slurry dispenses from one tank while new slurry is prepared in the second tank.  Dispense and mix alternates between tanks continuously, allowing for uninterrupted on-demand slurry delivery.  This twinned-tank arrangement eliminates the need to mix large batches of slurry and reduces concerns about pot-life and chemical management stored slurry.  Eliminating the use of a day-tank for slurry storage also allows for an exceptionally compact footprint.

    The Gemini-2 delivers two slurries with a footprint that is a small fraction of what a typical single slurry delivery system requires.  Occupying less than six square feet and with its two sets of twinned tanks, the system includes all of the needed slurry management features, including slurry humidification, nitrogen backfill and automated clean and purge capability.  Along with being simple to maintain, the system design supports rapid clean and changeover of slurry types.


 Additional Info

New Exhibitor:
No
New Products:
Yes
Displaying Equipment:
Yes
Product Demonstrations:
Yes
Please indicate which segment(s) your company serves
MEMS, Semiconductor, Water Processing

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