Proway Technology Co., Ltd.

No.22, Wuquan 3rd Rd.
Wugu Dist.
New Taipei City,  24891

  • Booth: 2546

Thermal Dry Etching-advanced revolution-remove GaN/AlN/AlGaN

Unique Technology- Thermal Dry Etching removes the GaNitride layer of Epitaxy wafers and specific contamination(GaN, AlGaN, and AlN) on MOCVD parts.

Processing Capability:

1.Wafer Recycle (Sapphire/SiC)
   Type: Dummy wafer, MESA wafer, AlN PSS wafer, and SiC wafer.
   Size: 2", 4", 6"...etc.

   Thermal Dry Etching is different from polishing and wet etching method. After thermal dry etching, the wafer can be recovered to the original substrate condition without damage. The most important thing is it can removes GaN/AlGaN/AlN perfectly.

2.Parts Cleaning
   The available brand for cleaning:
   Thomas Swan
   parts material: Quartz, SiC coating graphite
   Thermal dry etching can clean the contaimination on the parts, and it can extend the parts' lifetime compared to the traditional ways.


We've built up our reputation and have brought the benefit for our customers in Taiwan, Korea, and China of LED and Semiconductor industry.
We're looking forward to working with you, and hope you enjoy the exhibition.


 Press Releases

  • (20160502)

    AIX G3, G4, G5, R6 SiC parts : main disc, satellite, ceiling, in/out cover, etc.

    Thomas swan, Crius I, Crius II: Susceptor

    Veeco K465, K465i, C4, Redbull SiC parts: Carrier

  • (20160502)

    Available size: 2", 4", 3", 6"...

    Category: Plane/PSS

    Removeable materials: GaN, AlGaN, AlN

    Quotation: According to customer's order q'ty to quote the price

    Merit: Wafer's thickness will not be changed, and there's no need to change wafer's epi recipe.


  • PSS wafer recycle
    GaN on Sapphire...

  • After our thermal dry etching, the pattern is not going to be changed.
  • SiC wafer recycle
    SiC wafer...

  • Remove the material on SiC wafer
  • Parts Cleaning
    Before and After...

  • Parts Cleaning



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LED/solid state lighting, Power Semiconductors, Semiconductor, Materials, Sub-systems/Components/Parts

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