IntelliDrives, Inc.

8510 Bustleton Ave
Philadelphia,  PA  19152-1204

United States
http://www.intellidrives.com
  • Booth: 2433


Linear actuators, rotary tables and multi-axes systems

IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.


 Press Releases

  • IntelLiDrives, inc. RotoRingTM Series rotary actuators provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives.

    They combie ial bruhless RotoLinerTM motoring modules and planar air bearings integrated in a compact, direct drive configuration rotary tables. Large area air bearings provide sufficient payload stiffness and maximizes performance in respect to wobble and run-out.

    Radially distributed RotoLinearTM motoring modules provide high positioning stiffness during rotary indexing and when installed on moving XY tables.

    These rotary tables provide unlimited rotation and are capable of precise positioning and velocity controls when used with micro-stepping drives. Can also be equipped withIntelLiCoder feedback for closed loop operation.

     RotoRingsTM rotary tables can be mounted in any orientation and have "large open center design". When used in processing 12" semiconductor wafers, every area of the wafer can be accessed.

     In general automation applications large open center offers the opportunity to access parts from inside and outside of the table simultaneously. This feature allows robotic devices, pick and place and ancillary tooling to be mounted inside the table, saving floor space and reducing parts handling with increased productivity.

  • IntelLiDrives Cartesian Planar XY Table offers the unique capability to operate two axes of motion in one plane with one motor. These systems designed to replace conventional compounded XY tables  where one axis is being carried by another. As a result, with the planar systems greater reliability and performance is realized through design simplification and elimination of wear-prone components.

     

    Multi axes XY-Z-Rotary system integrates XY planar forcer with air bearing Lift-Rotary Stage. Planar  XY Table can operate in any orientation (side wall, upside-down) with multiple forcers installed and operated  independently on a single platen for high throughput and flexibility in many robotic automation applications.

  • IntelLIDrives, Inc. released a new model of large aperture ultra-thin direct drive rotary tables (DDR) for large 300 mm semiconductor wafers ACR335UT.

    This rotary table features:

    Direct drive (DDR) technology

    Resolution 0.2 arc-sec

    Repeatability 0.5 arc-sec

    Max speed 300 rpm

    Center aperture 335 mm

    Ultra-thin design 22 mm

    The ACR-335UT precision rotation stage is the lowest profile rotary table with high-speed direct-drive rotary servo motor on the market.

    Large 335 mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300-mm silicon wafers for semiconductor processing.

    ACR-335UT has very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and accelerate quickly to 300 rpm.  

    This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.

    These features make the ACR-335UT outperform the stability, acceleration and settling speed of traditional servo motor gear-driven mechanisms. 

    IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.  

    For addional information visit IntelLiDrives website


 Products

  • LARGE APERTURE XY-ROTARY COMBINATION STAGES
    Precision XY-Rotary stage with large center opening...

  • IntelLiDrives, Inc. released  three new models of the open frame XY-Rotary systems for wafer handling applications:

                XY travel:                         200x200, 280x280, 350x350 mm travel

                Apertures:                       160, 260, 335 mm

                Repeatability linear:      <5 microns

                Repetability angular:     < 2 arc-sec

                Linear axes:                    precision ball screw or linear motors

                Rotary axis:                     direct drive rotary stage

    This modularly designed low profile wafer presentation  XY-Rotary  system consists of advanced motion technologies for high accuracy, reliability and clean room operation.

    System integrates direct drive ultra-thin ACR-UT rotary tables with large clear center aperture and low profile open frame motorized XY tables. This system is  scalable for 150 mm to 450 mm wafer applications and allows modular installation into host manufacturing equipment or to be used as a stand-alone high performance multi-axis stage.

    For addional information visit here

     

  • SERVO-BELT 350 LARGE APERTURE ROTARY TABLE
    Motorized belt actuator with large center aperture...

  • IntelLiDrives, Inc. released a new cost effective motorized belt driven Large Aperture Rotary Actuator model RTHP-B-350 that features high accuracy and repeatability in a low profile package for medium to high load applications.

    SPECIFICATIONS

    • - Center aperture 350 mm

    • - Low profile 60 mm

    • - Unlimited rotation

    • - Load capacity 150 kg

    • - Speed 200 RPM

    • - Repeatability 45 arc-sec

    • - Preloaded 4-point ball bearing

    • - Belt drive mechanism

    • - Stepper/Servo motor with encoder

    • - Motor up/down mount option

  • ULTRA-THIN, LARGE APERTURE ROTARY SERVO TABLES
    Large aperture ultra-thin direct drive rotary tables (DDR) for large 300 mm and 450 mm semiconductor wafer processing ...

  • IntelLIDrives, Inc. released a new model of large aperture ultra-thin direct drive rotary tables (DDR) for large 300 mm semiconductor wafers ACR335UT.

    This rotary table features:

    - Direct drive (DDR) technology

    - Resolution 0.2 arc-sec

    - Repeatability 0.5 arc-sec

    - Max speed 300 rpm                  

    - Center aperture 335 mm

    - Ultra-thin design 22 mm

    The ACR-335UT precision rotation stage is the lowest profile rotary table with high-speed direct-drive rotary servo motor on the market.

    Large 335 mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300-mm silicon wafers for semiconductor processing.

    ACR-335UT has very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and accelerate quickly to 300 rpm.  

    This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.

    These features make the ACR-335UT outperform the stability, acceleration and settling sped of traditional servo motor gear-driven mechanisms. 

    IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.  

    For addional information visit IntelLiDrives website


 Additional Info

New Exhibitor:
No
New Products:
Yes
Displaying Equipment:
Yes
Product Demonstrations:
Yes
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Water Processing, Packaging/Assembly, Sub-systems/Components/Parts

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