Cast Aluminum Solutions LLC

1310 Kingsland Drive
Batavia,  IL  60510

United States
http://www.castaluminumsolutions.com
  • Booth: 5523


Pedestal Heaters, Fluid Heaters & More for Wafer Processing

Cast Aluminum Solutions (CAS) designs & manufactures precision-engineered components for semiconductor equipment OEMs and end-users worldwide.  We specialize in thermal devices used in wafer processing and CAS is a leading supplier of 200 & 300 mm Pedestal Heaters.

Our list of innovations includes platens with both heating & cooling capabilities, several 450 mm chucks, and a host of unique circulation heater configurations. The PUR-X Circulation Heaters feature replaceable PFA flow-tubes, and our CAST-X High Temp Circulation Heaters are capable of heating liquids & gases to 600°C.

In addition to 3-D structural modeling and FEA (finite element analysis) thermal modeling, our in-house test lab includes infra-red thermal imaging, x-ray & ultrasound tech, vacuum chamber testing, lifecycle testing and more. The CAS manufacturing facility features the latest pressure-casting systems, advanced CNC machining & finishing, and cleanroom electrical assembly.

CAS customers view us as “an extension of their customers engineering team.” due to the relationships we build in developing, testing and manufacturing our products. Visit the CAS Team at Booth 5523 !


 Press Releases

  • CAS Launches High-Purity Circulation Heater for Semiconductor Market

                                                                                                                                                                                                                 

    Cast Aluminum Solutions (CAS), a leader in designing & manufacturing highly-engineered thermal components for the semiconductor industry, announces the release of PUR-X Circulation Heaters.

    PUR-X features a replaceable PFA flow-tube.  The resilient PFA (Teflon®) tube material stands-up to the caustic solvents PUR-X is called upon to heat.  If contamination should occur, PUR-X’s flexible tube can be field-replaced in as little as 15 minutes, without the need for a service call.

    PUR-X Heaters are capable of heating solvents (wafer washing), DI water (rinsing), or N2 (wafer drying).  Another PUR-X feature is the “isolation factor”:  heated media never touches the heating elements.  Liquids and gases are isolated in PUR-X’s flow-tube: this facilitates the safe heating of flammable media, but the design also reduces contamination.

    PUR-X is available in two sizes:  PUR-X 1000 and PUR-X 2000.  Both units are available in multiple worldwide voltages.  The PUR-X 1000 model has a maximum power output of 4.5 kW, and PUR-X 2000 has a range to 7.9 kW.  Units are also equipped with explosion-proof electrical enclosures, for safe deployment in hazardous environments.  Special protective Teflon® coatings for the heater’s core aluminum body are also available.

    Tony Meadors, Vice President of Semiconductor Industry Sales at CAS, explained “PUR-X fits processes where media must remain contamination-free.  This includes ultra-pure heating of DI water and photo-resist removal solvents …but because PUR-X can also heat gases, it can be used in wafer drying applications to heat nitrogen or air.”

    Cast Aluminum Solutions offers a range of heat transfer products to the semiconductor industry, including chamber heaters, custom heater assemblies, and a wide selection of heated pedestals & platens for wafer processing.  The PUR-X design is an augmentation of CAS’s well-respected CAST-X circulation heater design.

    PUR-X circulation heaters will be available worldwide, purchased through CAS’s team of application engineers and distributors located throughout the America’s, Europe and Asia.

    Please visit Cast Aluminum Solutions at Booth # 5523 at Semicon West 2017, where PUR-X will be on display.

    For further information regarding Cast Aluminum Solutions (CAS) or PUR-X Circulation Heaters, please contact

    Jeffrey Awe, CAS Marketing Director.  Contact information is above.  Thank you. 

    PUR-X 1000 Web Page

    PUR-X 2000 Web Page

    PUR-X 2000 and PUR-X 1000 Features:

    • Field-replaceable PFA flow-tube

    • Wafer washing, rinsing, drying

    • Teflon coated body

    • No-contact “indirect heat” means it’s safe for flammable & hazardous media

  • Cast Aluminum Solutions (CAS), a leader in designing & manufacturing highly-engineered thermal components for the semiconductor industry, is pleased to announce the release of its new line of CAST-X High Temp Circulation Heaters.

    CAST-X “HT” – the latest progression forward for the company’s proven CAST-X Circulation Heater design– can achieve operating temperatures of 600°C (1112 F).

    CAST-X HT features a bronze body (as opposed to standard CAST-X’s aluminum body), which gives HT the ability to withstand higher temperatures.  To separate the electronic connections from the heat, standoff housings are standard on CAST-X HT units.

    Like all heaters in the CAST-X Family, the new High Temperature models have seamless stainless steel flow-tubes: heated media is isolated in these tubes, never contacting the heating elements (or any other components within the heater), thus making CAST-X Heaters perfect for applications involving flammable media or high-purity processes.

    CAST-X HT is available in three sizes:  CAST-X HT 500 (1.5kW max power, with 1/4” 6.3 mm flowtube), CAST-X HT 1000 (3 kW max power, with 5/16” 7.9 mm flowtube), and CAST-X HT 2000 (6 kW max power, with 1/2” 12.7 mm flowtube).

    According to Tony Meadors, Vice President of Semiconductor Industry Sales at CAS, “our engineers work in very close conjunction with our customer’s engineers…and we’ve seen, across multiple sectors, a fairly strong desire to meet or break the 500°C mark.  So CAS is happy to rollout CAST-X HT.  It’s a strong product line for an increasingly strong niche”

    Cast Aluminum Solutions offers a range of thermal products to the semiconductor industry, including chamber heaters, custom heater assemblies, and a wide selection of heated pedestals & platens for wafer processing applications.

    CAST-X HT Circulation Heaters will be available worldwide, purchased through CAS’s team of application engineers and distributors located throughout the America’s, Europe and Asia.

    Please visit Cast Aluminum Solutions at Booth # 5523 at Semicon West 2017, where CAST-X HT will be on display.

    For further information regarding Cast Aluminum Solutions (CAS), please contact Jeffrey Awe, CAS Marketing Director.  Contact information is below.  Thank you. 

    Jeff Awe

    Marketing Director

    Cast Aluminum Solutions

    1310 Kingsland Drive

    Batavia, IL  60510

    Main:  (630) 879-2696

    Direct:  (630) 482-5325

    jawe@castaluminumsolutions.com

    www.castaluminumsolutions.com


 Products

  • PUR-X PFA-TUBE CIRCULATION HEATER
    PUR-X Circulation Heaters feature REPLACEABLE PFA FLOW-TUBES. The unique design isolates heated liquids & gases in PFA tubes, never allowing contact with the heating elements. Allows for safe heating of flammable & caustic media. Booth 5523....

  • PUR-X PFA-TUBE CIRCULATION HEATERS

    Maximum Operating Temperature:  200°C (392°F)

    Max Power:

    PUR-X 1000:  4.5 kW

    PUR-X 1000:  7.9 kW

    Flow-Tube Sizes:  PUR-X 1000 and PUR-X 2000:

    OD = 3/8”  9.5 mm

    WALL THICKNESS = .031”  .78 mm WALL

    Design Features:

    • FLOW-TUBE IS FIELD-REPLACABLE IN 15 MINUTES

    • NO SERVICE CALL NEEDED TO REPLACE FLOW-TUBE

    • Media is isolated in flow-tubes, never contacting heating elements

    • Allows for safe heating of flammable and caustic media

    • Liquid & gas compatible

    • Teflon-dipped body, to protect against degradation by solvents

    • Explosion-proof electrical enclosures available

    Semiconductor Applications:

    • Solvent Heating

    • DI Water Heating

    • N2 Heating

    PUR-X Circulation Heaters are designed and manufactured by Cast Aluminum Solutions.

    CAS is headquartered near Chicago and serves semiconductor equipment OEMs and wafer processors worldwide.

    For more on PUR-X, contact a representative from Cast Aluminum Solutions:

    www.CastAluminumSolutions.com

    Tel:  630-879-2696

    Sales@CastAluminumSolutions.com

  • CAST-X “HT” – 600°C HIGH TEMP CIRCULATION HEATER
    New CAST-X High Temp Circulation Heaters can heat liquids & gases to 600°C. With Stainless Steel flow-tubes that isolate the media, never allowing it to contact the heating elements, CAST-X HT can safely heat flammable solvents and gases. Booth 5523....

  • CAST-X HIGH TEMP “HT” CIRCULATION HEATERS

    Maximum Operating Temperature:  600°C (1112°F)

    Max Power:

    CAST-X HT 500:  1500 Watts

    CAST-X HT 1000:  3 kW

    CAST-X HT 2000:  6 kW

    Flow-Tube Sizes:

    CAST-X HT 500:    1/4”  - 6.3 mm OD

    CAST-X HT 1000:  5/16” - 7.9 mm OD

    CAST-X HT 2000:  1/2” - 12.7 mm OD

    Design Features:

    • Media is isolated in Seamless Stainless Steel flow-tubes

    • Allows for safe heating of flammable media

    • No-contact design.Media has no contact with heating elements

    • Liquid & gas compatible

    Semiconductor Applications:

    • Solvent Heating

    • DI Water Heating

    • N2 Heating

    CAST-X High Temp “HT” Circulation Heaters are designed and manufactured by Cast Aluminum Solutions.

    Our primary facility is located near Chicago. CAS serves semiconductor equipment OEMs and wafer processors worldwide.

    CAST-X HT is built on the proven “no contact with the heating element” principle made famous by the original CAST-X.

    For more on CAST-X HT, contact a representative from Cast Aluminum Solutions:

    www.CastAluminumSolutions.com

    Tel:  630-879-2696

    Sales@CastAluminumSolutions.com


 Additional Info

New Exhibitor:
No
New Products:
Yes
Displaying Equipment:
Yes
Product Demonstrations:
Yes

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