Verity Instruments, Inc.

2901 Eisenhower St
Carrollton,  TX  75007-4887

United States
http://www.verityinst.com
  • Booth: 6350

Products on display include: SD1024X, SE1024GL-CMOS, SD1024GM, SD1024G, and SD2048GH spectrometers.

Embedded Spectrometer: the SD1024X is a unique instrument that incorporates embedded endpoint processing eliminating the need for an application computer.  The SD1024X features a monitor & keyboard connection, a quad core industrial PC module, and a solid state drive for high reliability.

Value-line Spectrometer: The SE1024GL- CMOS spectrometer provides a cost effective solution for general purpose applications. Cost is reduced by the use of simpler packaging, LCD removal, reduced connector count and a detector that can be driven using simpler electronics.

Mid-grade Spectrometer: the SD1024GM is similar to the SD1024G. However, it uses a 2048 element 2 dimensional mid-grade CCD.

High Resolution Spectrometer: the SD2048GH spectrometer features improved resolution as compared to current high performance instruments.

Spectral Reflectometer: film thickness instruments on display include the SP2100™ Spectral Reflectometer, which features multi-fiber capability, real-time interferometric (IEP) endpoint or film thickness capability.


 Press Releases

  • Carrollton, Texas, October 2016 - Verity Instruments, Inc. is pleased to announce the availability of the SP2100 Spectral Reflectometer designed for film thickness measurement for in-situ and in-line applications.

    The SP2100 includes a high performance spectrometer and Xenon flashlamp. The spectrometer includes a two-dimensional, thermoelectrically cooled CCD array that enables simultaneous monitoring of one to eight fiber optic inputs allowing uniformity measurements of up to eight points on the same substrate. The Xenon flashlamp provides high intensity, wide spectral range illumination with the ability to separate contaminating background light, along with the ability to provide unblurred measurements in the case of a moving substrate.

    Verity's proprietary SpectraView™ application software includes  model based and fringe counting thin film measurement algorithms.

    Verity Instruments, Inc. is a leading supplier of instrumentation and software for thin film processing applications. http://www.verityinst.com

  • September 2, 2016- Verity Instruments is pleased to announce the release of the SE1024GL- CMOS spectrometer. The SE1024GL- CMOS spectrometer provides a cost effective solution for general purpose applications. As compared the SD1024GL, cost is reduced by the use of simpler packaging, LCD display removal, reduced connector count and a sensor that requires simpler electronics.

    Despite the cost reduction, the impact on performance is minimal, with the primary advantage of the SD1024GL being its wider dynamic range. In common with the SD1024GL, the SE1024GL uses the same CPU processor, embedded software, and optical head (except for the sensor).

    The SE1024GL spectrometer has similar performance to the SD1024GL, and it can be used with existing SpectraViewTM software. The SE1024GL-CMOS is 48% smaller than the SD1024G Series spectrometers, has a 200-800 nm range, and is RoHS Compliant.

    Verity Instruments, Inc. is a leading supplier of advanced instrumentation and software for optical endpoint determination as required in etch, CVD etchback, photoresist strip, CMP endpoint and related applications. Additional products include instruments for film thickness and etch depth measurement. Verity has been providing optical instruments for semiconductor processing since 1980. Additional information about the company and products can be found on Verity’s website at http://www.verityinst.com or by phone at (972) 446-9990.


 Products

  • SP2100
    Verity’s SP2100 Spectral Reflectometer is designed for a wide variety of film thickness and depth measurement applications, including those required in etch, CVD and CMP processes....

  • Verity’s Spectral Reflectometers are successfully controlling hundreds of semiconductor process tools worldwide.

    The key components of the SP2100 are the SD1024G spectrometer, FL2100 Xenon flashlamp, and SpectraView™ applications software. The heart of the SP2100 is the SD1024G Spectrometer, which uses a scientific grade CCD detector for excellent dynamic range, UV detection capability, and low noise. The SD1024G also has capability for multi-fiber input operation, and controls the flashlamp.

    The FL2100 flashlamp is a bright, broadband source useful for the applications described herein. The FL2100’s output has a strong UV content thus enabling the measurement of relatively thin film layers that would not otherwise be possible using a reflectometer. Since a flashlamp is used, the motion of moving wafers does not result in the blurring of data, which enables more accurate measurement.

  • SD1024X
    The SD1024X is a unique instrument that incorporates embedded endpoint processing eliminating the need for an application computer....

  • The SD1024X was designed for demanding semiconductor process applications. Its optical system employs a 1024-element, scientific-grade CCD array designed for multi-channel spectroscopy, offering high performance at a moderate cost. The advantages of the SD1024X include excellent ultraviolet (UV) response (down to 200nm),  stability against degradation under UV exposure, high sensitivity, wide dynamic range and superior output linearity.
  • Smart Spectrometer SD1024G Series
    The SD1024G Series uses common electronics, application software and enclosures. The differences between the different spectrometer models are the charge coupled device (CCD), optical platform and embedded software parameters....

  • The SD1024G was designed for demanding semiconductor process applications. Its optical system employs a 1024-element, scientific-grade CCD array designed for multi-channel spectroscopy, offering high performance at a moderate cost. The advantages of the SD1024G include excellent ultraviolet (UV) response (down to 200nm), stability against degradation under UV exposure, high sensitivity, wide dynamic range and superior output linearity.

    The SD2048GH is similar to the SD1024G. However, it uses a 2048-element high performance CCD, the “H” high optical throughput optics, a narrower slit, and reports spectral data in 0.25 nm increments.

    The SD1024GM is similar to the SD1024G. However, it uses a 2048 element mid-grade CCD. Since the CCD is 2 dimensional the SD1024GM can support multi fiber applications.


 Additional Info

New Exhibitor:
No
New Products:
Yes
Displaying Equipment:
Yes
Product Demonstrations:
Yes

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