Spellman High Voltage

475 Wireless Blvd
Hauppauge,  NY  11788-3951

United States
https://www.spellmanhv.com
  • Booth: 7729


Spellman... for all your HV DC Power Supply requirements.

Spellman High Voltage Electronics is the world's leading provider of precision, custom and standard high voltage DC power supplies and Monoblock® X-Ray sources for semiconductor, medical, industrial, security, analytical, and laboratory applications.

Our high voltage power supplies range from 3 W to over 200kW with voltages over 500kV. We offer solutions for ion and e-beam processes, electrostatic chucks, plasma treating and vacuum deposition.

  • EVA Series for e-beam evaporation include an optional filament gun supply. A low stored energy output is ideal for the dynamic load conditions of vacuum processes and user adjustable arc management settings allow for individual processes optimization.
  • ESC Series for electrostatic chuck wafer handling applications provide well regulated, clean and accurate voltages. Options include reversible and true floating bipolar output. Built in fault diagnostics for real time status.

As a global supplier with strategically located design and manufacturing facilities in North America, Europe and Asia, Spellman is committed to providing best-in-class support to OEM customers and end-users throughout the world.


 Press Releases

  • SPELLMAN TO SHOWCASE THE ELECTROSTATIC CHUCK AND E-BEAM EVAPORATION HIGH VOLTAGE POWER SUPPLIES

    AT SEMICON 2017

    Spellman High Voltage Electronics Corporation, the world’s largest independent manufacturer of custom high voltage power conversion products, announces that it will exhibit at SemiCon 2017 from July 13-17 in San Francisco, CA. Spellman’s booth number will be 7729.

    This year, Spellman will focus on the electrostatic chuck (E-chuck) high voltage power supply for the semiconductor industry, as well as on the EVA Series which is specifically designed for demanding electron beam coating applications.  Spellman’s products are world renowned for their high performance, superior value and best overall design. Spellman sales engineers will be on-hand to answer technical questions on high voltage power supplies or to provide quotations for specific models.

    Electrostatic Chuck High Voltage Supply

    First, Spellman’s ESC Series of electrostatic chuck power supplies provide clean and accurate voltages required for electrostatic chuck wafer processing applications. These custom designed, well regulated supplies pre­cisely secure the wafer during lengthy process cycles. Versions are available with a ground referenced reversible output in addition to units featuring a true floating bipolar output with associated floating center tap point. Comprehensive fault diagnostic circuitry monitors power supply functionality and communicates status data to the user interface. Spellman’s ESC Series power supplies are housed in compact, lightweight packages designed for OEM installations requiring minimal system footprint space.

    E-Beam Evaporation High Voltage Power Supply

    Designed for demanding electron beam coating applications, Spellman’s EVA Series contains a full featured front panel providing local control, while an extensive analog interface allows remote capability. The included Ethernet and RS-232 digital interfaces simplify integrating the EVA into your system design.

    The EVA’s robust IGBT inverter design is inherently fault tolerant. The proprietary low capacitance, low stored energy high voltage output section is ideal for dynamic load and fault conditions encountered in coating applications. Fast arc recovery times (<2ms) minimize process interruptions. Many operational parameters can be configured by the user to suit their particular requirements. Additionally, the EVA can support optional one, two or three filament gun supply channels providing unprecedented flexibility and cost effectiveness.

    Spellman High Voltage Electronics is the world's leading provider of high performance, custom and standard DC high voltage power converters and Monoblock® X-Ray sources for medical, industrial, semiconductor, security, analytical, laboratory and under-sea cable power-feed applications. As a global supplier with strategically located design and manufacturing facilities in North America, Europe and Asia, Spellman is committed to providing best-in-class support to OEM customers and end-users throughout the world.

    Additional information on Spellman and their wide range of high voltage products is available at: spellmanhv.com


 Products

  • Electrostatic Chuck High Voltage Supply
    Our e-chuck power supplies provide clean accurate voltages required for e-chuck wafer processing applications. •Ground Referenced, Reversible Output •Floating, Reversible Bipolar Output •Comprehensive Fault Diagnostics •OEM Customization Available...

  • Spellman’s ESC Series of e-chuck power supplies provide clean and accurate voltages required for e-chuck wafer processing applications. These custom designed, well regulated supplies pre­cisely secure the wafer during lengthy process cycles. Available with a ground referenced reversible output as well as a true floating bipolar output with associated floating center tap point. Comprehensive fault diagnostic circuitry monitors power supply functionality and communicates status data to the user interface. ESC Series power supplies are housed in compact, lightweight packages designed for OEM installations requiring minimal system footprint space

    ESC5PN25 

    Output Configuration:

    Single ground referenced HV output, positive or negative polarity

    Input:

    +24Vdc, ±5% @ 2 amps, maximum

    Output:

    +2kV to -5kV. 2mA @ +2kV, 5mA @ -5kV

    Short Circuit Current Limit:

    5.5mA, maximum

    Output Isolation:

    None, ground referenced output

    Slew Rate:

    80ms, typical

    Maximum Cycle Frequency:

    10 times per second

    Overshoot:

    <10% of set point value 

    Ripple:

    10Vrms

    Line Regulation:

    ±0.7% over specified range

    Load Regulation:

    ±0.7% over specified range

    Output Voltage Accuracy:

    <2% of set point value between 50-5000Vdc 

    Program/Monitor Accuracy:

    1% of full scale, ±50mV

    Dimensions:

    9.W x 1.5.H x 6.1.L (228.6mm x 30.5mm x 155mm)

    Weight:

    4.5lbs. (2kg)

    ESC01.5PN7.5

    Output Configuration:

    Floating, reversible polarity bipolar output with floating center tap

    Input:

    +24Vdc, ±10% @ 2 amps, maximum

    Output:

    Bipolar, 0 to ±750Vdc (0 to 1500Vdc total) @ 5mA

    Short Circuit Current Limit:

    5.5mA, maximum

    Output Isolation:

    Center tap is isolated for ±2kV from ground

    Slew Rate:

    40ms, typical

    Maximum Cycle Frequency:

    10 times per second

    Ripple:

    2.5Vrms

    Line Regulation:

    ±0.7% over specified range

    Load Regulation:

    ±0.7% over specified range

    Output Voltage Accuracy:

    <1% of set point between 50-1500Vdc 

    Program/Monitor Accuracy:

    0.5% of full scale, ±50mV

    Dimensions:

    3.4.W x 3.H x 10.5.L (86.5mm x 76.5mm x 266.7mm)

    Weight:

    5lbs. (2.3kg)

  • E-Beam Evaporation High Voltage Power Supply
    EVA SERIES • Designed for E Beam Coating Applications • 3kW, 6kW and 12kW Power Levels • Remote Analog and Ethernet/RS-232 Interface • Fast, User Configurable Dynamic Arc Intervention • Optional Filament Gun Supply (up to 3 channels) ...

  • E-beam Evaporation High Voltage Power Supply

    Spellman’s new EVA Series is specifically designed for demanding electron beam coating applications. A full featured front panel provides local control, while an extensive analog interface allows remote capability. The included Ethernet and RS-232 digital interfaces simplify integrating the EVA into your system design.

    The EVA’s robust IGBT inverter design is inherently fault tolerant. The proprietary low capacitance, low stored energy high voltage output section is ideal for dynamic load and fault conditions encountered in coating applications. Fast arc recovery times (<2ms) minimize process interruptions. Many operational parameters can be configured by the user to suit their particular requirements

    An optional filament gun supply is available. The EVA can support one, two or three filament gun supply channels providing unprecedented flexibility and cost effectiveness.

    Specifications

    (Ref. 128106-001 REV. D)

    3/6/12KW HV SPECIFICATIONS

    Input Voltage: (must be specified at time of order)

    Option 3PH: 180-264Vac, 50/60Hz, three phase, 90% efficiency, 0.85 power factor

    Option 1PH: 180-264Vac 50/60Hz, single phase, 90% efficiency, 0.65 power factor (3kW & 6kW only)

    Option 400VAC: 360-528Vac 50/60Hz, three phase, 90% efficiency, 0.85 power factor (6kW & 12kW only)

    Input Current:

    Option 3PH: 180-264Vac, 50/60Hz, three phase

    3kW—13 amps, maximum

    6kW—25 amps, maximum

    12kW—50 amps, maximum

    Option 1PH: 180-264Vac, 50/60Hz, single phase

    3kW—29 amps, maximum

    6kW—57 amps, maximum

    Option 400VAC: 360-528Vac, 50/60 Hz, three phase,

    6kW—13 amps, maximum

    12kW—25 amps, maximum

    Output Voltage:

    5kV @ 600mA, negative polarity. 3kW maximum.

    10kV @ 600mA, negative polarity. 6kW maximum.

    10kV @ 1200mA, negative polarity. 12kW maximum.

    Local Output Controls:

    Voltage is continuously adjustable over entire range via a 10 turn potentiometer.

    Voltage Regulation:

    Load: 0.05% of full voltage +500mV for full load change.

    Line: 0.05%of full voltage +500mV over specified input range.

    Ripple:

    <3% Vrms 

    Stability:

    0.02%hr. after 1 hour warm-up.

    Temperature Coefficient:

    100ppm/°C.

    Environmental:

    Temperature Range:

    Operating: 0°C to 40°C

    Storage: -40°C to 85°C

    Humidity:

    10% to 90% RH, non-condensing.

    Cooling:

    Forced air; inlet through side panels, outlet at rear panel

    Metering:

    Front panel digital voltage and current meters, 3.5 digit, accurate to within 1%.

    3/6/12KW HV SPECIFICATIONS

    System Status Display:

    “Dead Front” type indicators provide status of up to 12 system parameters including voltage regulation, fault conditions and circuit control.

    Input Power Connector:

    A 6 foot (1.8 meter) long captive line cord will be provided.

    Analog Interface Connector:

    50 pin female D connector

    High Voltage Output Cable:

    10 ft (3.05m) shielded high voltage cable, removable at rear panel.

    Dimensions:

    3kW/6kW Units: 5.25”(3U)H x 19” W x 21” D (133mm x 482mm x 533mm)

    12kW Units: 10.5”(6U)H x 19” W x 21” D (266mm x 482mm x 533mm)

    Weight:

    3kW/6kW Units: 46 pounds (20.87kg)

    12kW Units: 90 pounds (40.82kg)

    Regulatory Approvals:

    2004/108/EC, the EMC Directive and 2006/95/EC, the Low Voltage Directive, approval pending.

    Digital Interface

    The EVA features a standard RS-232 and Ethernet digital interface, simplifying power supply communication require­ments saving the user time and money, while enhancing functionality and overall capability. Spellman provides a GUI allowing customization of operational features while also providing basic power supply functionality and control via a sample simulated front panel.

    Arc Intervention

    Spellman’s EVA power supplies sense arc events via a fast acting current sense transformer. The arc intervention cir­cuitry prevents power supply damage from continuous, long term arcing. Customers can change arc intervention para­meters (Arc Count, Arc Quench, Reramp Time, and Window Time) within preset limits via the provided GUI. Customized units can be configured for unique arc prone environments, contact Spellman for details.

    Additional High Voltage Output Connectors

    Spellman’s EVA is designed to provide 1, 2 or 3 parallel configured high voltage output connectors. The standard unit provides one high voltage output connector. If you intend to use the EVA in a multi channel application but want to utilize your own filament power supply, this factory installed option provides the additional high voltage con­nections required. Hardware Option HV2 provides two high voltage output connectors, while Hardware Option HV3 pro-vides three high voltage output connectors.

    Multiple beam control units can be provided, allowing 1, 2 or 3 separate electron guns to be independently operated.

    Each beam control unit consists of a beam controller and a gun output box. The beam controller is a 1U rack-mounted chassis containing the filament power, control and emission regulation circuitry. The gun output box contains the high frequency filament transformer which is referenced to the high voltage output potential. This box should be mounted close to the electron gun to minimize the length of the high current filament connections. The box also contains electron gun emission current monitoring circuitry and provides a feedback signal used to regulate the electron gun emission current.

    Each beam control channel, if operated alone, can utilize 0 to 100% of the rated emission current capacity. When two or three beam control channels are used at the same time, the total system emission current capacity remains the same. Individual channel programming must be done such that the total current does not exceed the system’s total emission current available.

    Optional Beam Controller (Filament Power Supply) and Gun Output Box (please request information)


 Additional Info

New Exhibitor:
Yes
New Products:
Yes
Displaying Equipment:
Yes
Product Demonstrations:
No

Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".