HORIBA Instruments Inc.

430 Indio Way
Sunnyvale,  CA  94085

United States
http://www.horiba.com
  • Booth: 5655


Visit the global leader in process metrology and control

HORIBA is a global group of companies that provides analytical and measurement equipment in Semiconductor and other industries.  We are a global leader in process metrology and control and we are expanding our business operations by leveraging our advanced technological capabilities and global network.  Our Semiconductor product offering ranges from gas and liquid flow components to particle detectors for CMP and complex concentration monitoring equipment.  Visit our booth #5655 to see the latest in our applications-based product development that supports the next generation of process requirements for Semiconductor manufacturing.


 Press Releases

  • SUNNYVALE, CA June 28th , 2017 – HORIBA Semiconductor, global leader in Wet Process Monitoring, features its CS-700 for simultaneous monitoring of multi-constituent chemical baths used in critical wet processes at SEMICON West 2017 in San Francisco, CA. Based on HORIBA’s industry standard CS platform, the CS-700's advanced spectroscopic optical design enables multi-constituent monitoring of wet process chemistries. The new design enables simultaneous monitoring of an unprecedented eight bath constituents. “The CS-700 represents a great advancement in the monitoring of process chemistries. By leveraging a proven design, we have been able to create a monitor that gives users far greater versatility in process monitoring that enables next generation processes”, said Mark Mahoney, Business Development Manager for Wet Products at HORIBA Semiconductor. HORIBA technologies for wet process monitoring are used globally for critical process monitoring and control and the CS-700 represents the latest in applications-driven technology development that supports the Semiconductor Industry. HORIBA Semiconductor, part of HORIBA INSTRUMENTS, INC., headquartered in the United States, provides an extensive array of instruments and solutions for applications across a broad range of Semiconductor processes. HORIBA Semiconductor is a world leader in the measurement and control of critical process chemistries. Our instruments are found in equipment and facilities worldwide and HORIBA is a recognized technology leader in the Semiconductor industry. Media Contact: Paul Totten Segment Marcoms Leader HORIBA Semiconductor paul.totten@horiba.com (480) 221 2532
  • SUNNYVALE, CA June 28th, 2017 – HORIBA Semiconductor, global leader in Process Metrology and Control Components, introduces the HD-960L for parts-per-billion level monitoring of Dissolved Oxygen (DO) in chemicals, with a low sample-consumption rate. The HD-960L is specifically designed to enable processes that require ultra-low or controlled levels of DO. The HD-960L uses an innovative polarographic sensor and an auto-ranging feature to give users real-time trace DO data from ppb level to saturation in critical process chemistries. The technology allows users to monitor DO levels, avoid process excursions due to oxidation and more effectively control silicon etch rates. “The HD-960L’s low detection limit, high accuracy, low sample consumption and wide range make it the perfect choice for critical next-generation processes that require low levels of DO”, said Mark Mahoney, Business Development Manager for Wet Products at HORIBA Semiconductor. HORIBA technologies for wet process monitoring and control are used globally in critical Semiconductor manufacturing processes and the HD-960L represents the latest in applicationsdriven, wet process monitoring technology development that supports the Semiconductor Industry. HORIBA Semiconductor, part of HORIBA INSTRUMENTS, INC., headquartered in the United States, provides an extensive array of instruments and solutions for applications across a broad range of Semiconductor processes. HORIBA Semiconductor is a world leader in the measurement and control of critical process chemistries. Our instruments are found in equipment and facilities worldwide and HORIBA is a recognized technology leader in the Semiconductor industry. Media Contact: Paul Totten Segment Marcoms Leader HORIBA Semiconductor paul.totten@horiba.com (480) 221 2532
  • SUNNYVALE, CA June 28th, 2017 – HORIBA Semiconductor, global leader in Process Metrology and Control Components announces the addition of an EtherCAT® interface to its industry-leading Mass Flow and Pressure Controllers / Meters. Recognizing an increasing demand for EtherCAT® , HORIBA now offers the high speed communications option on several of its critical process control components. Included in the rollout are HORIBA’s leading thermal mass flow controllers, the SEC-Z500X, the pressure-based CRITERION D500 mass flow module, and the GR-300 series of pressure controllers. “Major Semiconductor end users and OEMs are shifting from established digital communications platforms to EtherCAT® to improve data speed, process time clock reliability, and to reduce overall network and integration costs. By offering leading flow and pressure components with an EtherCAT® interface, HORIBA continues to demonstrate its commitment to providing components and solutions that meet the ever-changing needs of the industry.” said Patrick Lowery, Senior Director of Advanced Technology at HORIBA Semiconductor. HORIBA technologies for process fluid metrology and control are used globally in applications that demand the highest performance. Adding an EtherCAT® option allows customers to keep pace with increasing process data demands and to further enhance process performance by using HORIBA’s industry leading components. HORIBA Semiconductor, part of HORIBA INSTRUMENTS, INC., headquartered in the United States, provides an extensive array of instruments and solutions for applications across a broad range of Semiconductor processes. HORIBA Semiconductor is a world leader in the measurement and control of critical process chemistries. Our instruments are found in equipment and facilities worldwide and HORIBA is a recognized technology leader in the Semiconductor industry. EtherCAT is a registered trademark of Beckhoff Automation GmbH, Germany. Media Contact: Paul Totten Segment Marcoms Leader HORIBA Semiconductor paul.totten@horiba.com (480) 221 2532

 Products

  • D500 Mass Flow Module
    Fast-response, high accuracy mass flow module...

  • HORIBA's fast-response, high accuracy mass flow module meets the needs of advanced processes, provides real-time flow and pressure information and uses HORIBA's innovative G-LIFE to verify the process conditions for every run. The D500 is one of several components now available with an Ethercat communication option.  
  • IR 400
    Concentration monitor for the detection of trace amounts of cleaning gases such as NF3, SiF4, CF4 and WF6...

  • HORIBA's IR-400 Concentration monitor can detect trace amounts of cleaning gases such as NF3, SiF4, CF4 and WF6, and is now available with on-board gas type selection.  The technology allows improved control over chamber clean processes which translates to improved process uptime. 
  • HD960L
    Dissolved Oxygen (DO) monitor...

  • HORIBA's HD960L monitors PPB level Dissolved Oxygen (DO) in low concentration HF with a low sample-consumption rate.  This new technology enables improved monitoring of critical processes that require ultra-low levels of DO. 

 Additional Info

New Exhibitor:
No
New Products:
Yes
Displaying Equipment:
Yes
Product Demonstrations:
No

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