THERMOCOAX manufactures Custom Heating and Temperature measurement solutions for each wafer production step: Deposition CVD - PECVD - MOCVD - ALD - PVD, Patterning, Doping, Etching, Testing and Packaging.
Our solutions based on our Mineral Insulated Cables manufacturing are used also for Flat Panel Display, Flex Electronics or nanotechnology applications.
Wether you need our standard heaters or want a custom application, THERMOCOAX can provide you with a complete solution from initial prototype engineering to final product manufacturing:
Heating coils for Physical Vapor Deposition, Ion Source - evaporator with heater brased onto stainless steel, Heating tube - Cold ends heater coiled and brased on stainless steel, Inconel or molybdenum tube for Lithography Nanoimprint - Immersion and EUV, Hot Plates and Chucks for Chemical Vapor Deposition ALD - CVD - PECVD and MOCVD, Annealing Multi Heating Zones Ovens, Aluminum hot plates for Etching, and all silicon ISOPAD heating jacket solutions.
The THERMOCOAX SEMICON team is at your disposal for all information request.