Cast Aluminum Solutions LLC

1310 Kingsland Drive
Batavia,  IL  60510

United States
http://www.castaluminumsolutions.com
  • Booth: 304


Pedestal Heaters, Fluid Heaters & More for Wafer Processing

Cast Aluminum Solutions (CAS) designs & manufactures precision-engineered components for semiconductor equipment OEMs and end-users worldwide.  We specialize in thermal devices used in wafer processing.

CAS is a leading supplier of 200 & 300 mm Pedestal Heaters.

Our innovation list includes: PUR-Therm Gas Delivery Heaters (for high-purity carrier gas heating), Pedestal Heaters with multiple heat zones cooling functions, and PUR-X Circulation Heaters (featuring replaceable PFA flow-tubes). 

With a dedicated New Product Development Team customers view us as “an extension of their customers engineering team.” due to the relationships we build in developing, testing and manufacturing high-performance heating & cooling products for critical in-chamber applications as well as specialized inline heaters for wet bench processes.

Cast Aluminum Solutions is located near Chicago and serves customers globally via offices throughout North America, Europe and Asia.

Visit the CAS Team in the South Hall (near the front entrance) at Booth 304 !


 Press Releases

  • Cast Aluminum Solutions (CAS), a leader in designing & manufacturing highly-engineered thermal components for the semiconductor industry, is proud to announce the release of PUR-X Circulation Heaters.

    PUR-X Heaters feature a replaceable PFA flow-tube.  The resilient high-purity PFA (Teflon®) tube material stands-up to many of the caustic solvents involved in wafer processing.  In the event of contamination, PUR-X’s flexible tube can be field-replaced in as little as 15 minutes, without the need for a service call.

    PUR-X Heaters have been design to work in conjunction with wet bench applications, such as solvent and DI water heating, but these heaters are also well-suited for heating high-purity gases (nitrogen, argon, purified air) for processes such as wafer drying.

    PUR-X Heaters also have a special “isolated flow-path feature”:  heated media is isolated in the PFA flow-tube, never touching the heating element, or any other component within the heater.  This is a critical contamination prevention feature.  Adding to the heater’s safety rating, explosion proof (NEMA 7) terminal enclosures are available.  Up to three thermocouples may be installed to monitor operational temperature.  To protect the heater’s aluminum body from caustic chemicals and pitting, Teflon coatings are available.

    PUR-X is available in two sizes:  PUR-X 1000 and PUR-X 2000.  Both units are available in multiple worldwide voltages.  The PUR-X 1000 model has a maximum power output of 4.5 kW, and PUR-X 2000 has a range to 7.9 kW. 

    Tony Meadors, Vice President of Semiconductor Industry Sales at CAS, explained “PUR-X fits processes where media must remain contamination-free.  This includes ultra-pure heating of DI water and photo-resist removal solvents, but because PUR-X can also heat gases, it fits with drying applications that use heated nitrogen.”

    Cast Aluminum Solutions offers a range of heated products to the semiconductor industry, including pedestal heaters, custom-geometry chamber heaters, and a wide selection of circulation heaters.  The PUR-X design is an augmentation of CAS’s well-respected CAST-X circulation heater design.

    PUR-X circulation heaters are available worldwide, purchased through CAS’s team of application engineers and distributors located throughout the America’s, Europe and Asia.

    Please visit Cast Aluminum Solutions at Booth # 304 in Moscone’s South Hall during Semicon West 2018.

    CAS is located near Chicago and serves customers worldwide through our network of application engineers in Silicon Valley and offices in North America, Europe, and Asia.  Visit www.castaluminumsolutions.com

    For further information regarding Cast Aluminum Solutions (CAS) or PUR-X Circulation Heaters, please contact

    Jeffrey Awe, Marketing Director at Cast Aluminum Solutions.

    Jeffrey Awe

    Tel: 630-482-5325

    jawe@castaluminumsolutions.com

    Marketing Director, Cast Aluminum Solutions

    Batavia, Illinois – USA

    www.castaluminumsolutions.com

  • Cast Aluminum Solutions (CAS), a leader in designing & manufacturing highly-engineered thermal components for the semiconductor industry, is proud to announce the release of our PUR-Therm Gas Delivery Heater.

    PUR-Therm Gas Delivery Heaters are designed to heat carrier gases and chamber process gases.  Manufactured in compliance with the semiconductor industry’s most stringent purity standards, PUR-Therm Heaters deliver accurate temperature modification in a small, easy to control package. 

    Gases are isolated in PUR-Therm’s UHP stainless steel flow-tube, electropolished to a max. RA of 3.2 μin (.081 μm) to comply with Semi F19 standards.  The flow-tube’s coil radius meets Semi E49 standards, and its passivation specs meets ASTM-967 standards.  Particle tests for 0.1 and 0.3 μm-sized contaminants conclude the PUR-Therm Gas Delivery Heater meets Semi F70 standards for Ultra-High Purity.  Very few heaters on the market credibly can make these purity claims.

    The heat engine is a threaded cartridge heater, easily replaced in the event of failure or power requirement changes.  For accurate operating temperature monitoring, a dual-junction thermocouple is embedded within the heater body,

    PUR-Therm heaters are purchased “ready for installation” into gas cabinet environments, as they are equipped with high-purity VCR fittings.  Additionally, PUR-Therm is available with a “touch safe” insulation jacket, fabricated to meet Semi F2 standards.

    Jeffrey Awe, Product Manager and Marketing Director at CAS explained, “PUR-Therm was developed as a plug and play gasline heater that meets the semi industry’s highest standards for purity.  Accomplishing this required deep looks at material choices, internal manufacturing processes, new technologies, and of course, customer needs.  The result is a gas delivery heater that passes the industry’s most stringent particulate matter tests and is ready for wide market acceptance.”

    Please visit Cast Aluminum Solutions at Booth # 304 in Moscone’s South Hall during Semicon West 2018.

    CAS is located near Chicago and serves customers worldwide through our network of application engineers in Silicon Valley and offices in North America, Europe, and Asia.  Visit www.castaluminumsolutions.com

    For further information regarding Cast Aluminum Solutions (CAS) or PUR-X Circulation Heaters, please contact

    Jeffrey Awe, Marketing Director at Cast Aluminum Solutions.

    Jeffrey Awe

    Tel: 630-482-5325

    jawe@castaluminumsolutions.com

    Marketing Director, Cast Aluminum Solutions

    Batavia, Illinois – USA

    www.castaluminumsolutions.com

 Products

  • PUR-Therm Gas Delivery Heater
    PUR-Therm Gas Delivery Heaters from Cast Aluminum Solutions are designed to heat critical carrier and process gases. In compliance with semi market purity standards, PUR-Therm delivers accurate temperature control in a small, easy to control package....

  • PUR-Therm Gas Delivery Heaters from Cast Aluminum Solutions (CAS) are designed to heat carrier gases and chamber process gases.  Manufactured in compliance with semi industry’s stringent purity standards, PUR-Therm Heaters deliver accurate temperature control in a small, easy to control package.  Gases are isolated in the heater’s UHP stainless steel flow-tube, electropolished to a max. RA of 3.2 μin (.081 μm) to comply with Semi F19 standards.  The flow-tube’s coil radius meets Semi E49 standards, and passivation meets ASTM-967 specs.  Particle tests for 0.1 and 0.3 μm-sized contaminants show PUR-Therm meets Semi F-70 Ultra-High Purity Standards.  The heat engine is a cartridge-style heater that’s easily replaced (in the event of failure or power requirement changes).  A dual-junction thermocouple is embedded within the heater body, for accurate operating temperature monitoring.  CAS serves customers worldwide. Visit www.castaluminumsolutions.com or call 630-482-5325.

  • PUR-X Circulation Heater with PFA Flow-Tube
    PUR-X liquid & gas heaters feature a high purity PFA flow-tube that (A) stands up to caustic solvents and (B) is easily replaced if contamination occurs. From Cast Aluminum Solutions, PUR-X Heaters are designed wet bench and wafer drying applications....

  • PUR-X Circulation Heaters feature high-purity PFA flow-tubes, compatible with safely heating caustic solvents. If contamination should occur, the PFA tube is easily replaced.  PUR-X Heaters may be installed in-line or as part of a circulation loop. Available in 2 sizes, PUR-X 1000  and 2000 are also appropriate for heating solvents, DI water, and wafer drying applications (heating of gases such as nitrogen, argon, purified air). To comply with the safe heating of low-flashpoint solvents, PUR-X Heaters are available with explosion-proof terminal enclosures. Up to 3 thermocouples work to monitor and maintain operating temperature. PUR-X is available with an optional Teflon coating on the heater body, to protect against chemicals. PUR-X Heaters are designed and manufactured by Cast Aluminum Solutions, located near Chicago. CAS serves customers worldwide. Visit www.castaluminumsolutions.com or call 630-482-5325

  • Pedestal Heaters and Chamber Platens
    Cast Aluminum Solutions designs & manufactures precision Pedestal Heaters and Chamber Platens for wafer processing. Options include multiple hot zones, cooling functions, custom geometries & surface patterns, and an array of anodize & plate choices....

  • Cast Aluminum Solutions designs, tests, and manufactures custom-engineered Pedestal Heaters and Heated Chamber Platens for wafer processors and fab equipment OEMs.  With FEA Thermal Modeling capabilities and a large in-house R&D Lab, our dedicated New Product Development Team specializes in engineering & designing next-generation pedestal heaters.  CAS has designed a multitude of critical in-chamber pedestals with multiple heating zones, quick cool-down functions, and complex geometries on surface substrates and pedestal shafts. Materials include aluminum, SST, Inconel, and other alloys. Plating & coating options include electroless nickel, hard-coat anodizing, and more. Assembly and packaging can be completed to Semi specs at our in-house cleanroom. CAS is located near Chicago and serves customers worldwide through our application engineers in Silicon Valley and networked offices in North America, Europe, and Asia.  Visit www.castaluminumsolutions.com or call 630-482-5325.

 Additional Info

New Exhibitor:
No
New Products:
Yes
Displaying Equipment:
Yes
Product Demonstrations:
Yes
Please indicate which industries/technologies your company serves
LED/solid state lighting, MEMS, Plastic/organic/flexible electronics, Power Semiconductors, Semiconductor

Categories


Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".


For Technical Support with this webpage, please contact support.