HORIBA Instruments Inc.

430 Indio Way
Sunnyvale,  CA  94085

United States
http://www.horiba.com
  • Booth: 517


Visit the global leader in process metrology and control

HORIBA is a global group of companies that provides analytical and measurement equipment in Semiconductor and other industries.  We are a global leader in process metrology and control and we are expanding our business operations by leveraging our advanced technological capabilities and global network.  Our Semiconductor product offering ranges from gas and liquid flow components to particle detectors for CMP and complex concentration monitoring equipment.  Visit our booth #517 to see the latest in our applications-based product development that supports the next generation of process requirements for Semiconductor manufacturing.


 Press Releases

  • SUNNYVALE, CA July 2nd, 2018 – HORIBA Semiconductor, global leader in Process Metrology and Control Components, announces the introduction of the 6108 pH Probe for Wastewater treatment.

    Since 1945, the HORIBA brand has been synonymous with the accurate detection and measurement of critical process parameters. Our patented pH sensitive glass technology utilizes rare earth metals, allowing for quick response time in high acidic and basic environments. The 6108 pH Probe represents HORIBA’s latest development in wet process metrology and exhibits a technically advanced design which includes impact resistant glass, a wide operating range, resistance to damage by chemical exposure, and is a universal fit. The 6108 Probe is compatible with most existing pH power supplies and can be used in process, utility, and wastewater treatment applications.

    “The 6108 pH Probe is the latest in a decades long line of accurate and repeatable pH sensors from HORIBA.  Our tough, lead-free electrode design means the Probe can be used in a wide variety of applications and is backed by HORIBA’s reputation for accurate and repeatable sensing technology” said Angelina Dorman, Technical Marketing Manager, HORIBA Instruments Inc.   

    HORIBA technologies for process monitoring are used globally in applications that demand the highest performance.  The 6108 pH Probe is a reminder of HORIBA’s almost 70 year history in the measurement of pH and represents a versatile pH measurement option for our customers.  To see a live model of the probe, visit us at booth number 517 at Semicon West 2018 in San Francisco.

    HORIBA is a world leader in the measurement and control of critical process chemistries and our instruments are found in equipment and facilities worldwide. The HORIBA Semiconductor segment provides an extensive array of instruments and solutions for applications across a broad range of Semiconductor processes and in the United States is represented by HORIBA Instruments Inc.

    Media Contact:

    Paul Totten

    Segment Marcom Leader

    HORIBA Semiconductor

    paul.totten@horiba.com

    (480) 221 2532

  • SUNNYVALE, CA July 2nd, 2018 – HORIBA Semiconductor, global leader in Process Metrology and Control Components, announces the introduction of the EV 2.0 End Point Monitor.

    EV 2.0 is a configurable, high performance spectrograph that can be customized for a variety of OEM/End-user applications including but not limited to ALD/ALE, dry etch, plasma cleaning, and deposition processes. The spectrograph can be used for enhanced process control, stability / drift monitoring, and endpoint detection.

    With its proprietary high resolution holographic spectrograph equipped with a 2048x16 pixels Back-Thinned CCD and fast, 16 bit acquisition electronics, the EV 2.0 is capable of acquiring plasma light emission with optimised signal to noise ratio from 200 to 1050 nm. Exposure time varies from 20 ms to 2.5s depending on the intensity of the plasma.

    “The EV 2.0 is a successor to HORIBA’s EV 140 and includes a host of new features and capabilities. In particular, the new spectrograph includes easy-to-use software that not only provides continuous process monitoring, but it can also be used to create customized process recipes.  This extension of the EV 140 series shows how HORIBA continues to invest in research and development that drives solutions for process problems” said Paul Totten, Segment Marcom Leader at HORIBA Semiconductor.

    HORIBA technologies for process monitoring are used globally in applications that demand the highest performance. The EV 2.0 represents an innovative development that caters to specific customers’ process performance needs. The creation of the supporting software indicates HORIBA’s commitment to enhanced packaging of our solutions in a way that allows our customers to easily install, integrate, and operate them.  To see a live model of our spectrograph, visit us at booth number 517 at Semicon West 2018 in San Francisco.

    HORIBA is a world leader in the measurement and control of critical process chemistries and our instruments are found in equipment and facilities worldwide. The HORIBA Semiconductor segment provides an extensive array of instruments and solutions for applications across a broad range of Semiconductor processes and in the United States is represented by HORIBA Instruments Inc.

    Media Contact:

    Paul Totten

    Segment Marcom Leader

    HORIBA Semiconductor

    paul.totten@horiba.com

    (480) 221 2532

  • SUNNYVALE, CA July 2nd, 2018 – HORIBA Semiconductor, global leader in Process Metrology and Control Components, announces the addition of an EtherCAT® Mass Flow Controller with enhanced features.

    Recognizing a market need for a device that has both EtherCAT® connectivity and a user-adjustable response, HORIBA has introduced the SEC-Z707S.  Based on the successful SEC-Z700 Pressure Insensitive model, the SEC-Z707S offers users improved accuracy and an operating range from 0.5% to 100% of full scale. But most significantly, users can now select the time it takes for the MFC to reach its set point.  By applying a command signal, the response time can be adjusted anywhere from 300ms to one second, enabling a new level of process control.

    “Major Semiconductor end users and OEMs have shifted from established digital communications platforms to EtherCAT® to improve data speed, process time clock reliability, and to reduce overall network and integration costs. But the communications protocol is only half the story.  Process owners not only need data, but also advanced control options.  By focusing on improved performance and features, HORIBA continues to demonstrate its commitment to providing components and solutions that meet the ever-changing needs of the industry.” said Troy Freeman, Co-Segment Leader and Semiconductor Sales Manager at HORIBA Semiconductor.

    HORIBA technologies for process fluid metrology and control are used globally in applications that demand the highest performance. Adding an EtherCAT® option with enhanced performance allows customers to keep pace with increasing process data demands and to further enhance process performance by using HORIBA’s industry leading components. To see a live model of our SEC-Z707S flow controller, visit us at booth number 517 at Semicon West 2018 in San Francisco.

    HORIBA is a world leader in the measurement and control of critical process chemistries and our instruments are found in equipment and facilities worldwide. The HORIBA Semiconductor segment provides an extensive array of instruments and solutions for applications across a broad range of Semiconductor processes and in the United States is represented by HORIBA Instruments Inc.

    Media Contact:

    Paul Totten

    Segment Marcom Leader

    HORIBA Semiconductor

    paul.totten@horiba.com

    (480) 221 2532


 Products

  • EV 2.0 Endpoint Detector
    Configurable endpoint detector. ideal for monitoring ALD/ALE, dry etch, plasma clean, and deposition processes....

  • HORIBA's EV 2.0 provides accurate and repeatable endpoint detection.  The system is configurable and uses a proprietary high resolution holographic spectrograph that provides a new level of performance ideal for ALD/ALE, dry etch, plasma cleaning, and deposition processes. Come and see HORIBA’s latest process endpoint detection innovation at Booth 517
  • Z707S EtherCAT Flow Module
    Z707S - HORIBA's new EtherCAT enabled, Pressure Transient Insensitive Mass Flow Module...

  • Z707S - HORIBA's new EtherCAT enabled, Pressure Transient Insensitive Mass Flow Module with user-selectable response provides a new level of process tuning and user-configurability.  Improved data speed and enhanced performance features are designed to meet the latest needs of the Semiconductor industry. Come and see the new Z707S at HORIBA Booth 517
  • 6108 pH Probe
    6108 pH probe - Utilizing HORIBA’s patented pH sensitive glass technology...

  • 6108  - HORIBA’s patented pH sensitive glass technology utilizes rare earth metals, allowing for a quick response time in highly acidic and basic environments. Features include impact resistant glass, wide operating range, enhanced chemical resistance and universal fit / power supply compatibility.  Come and see our new pH probe at Booth 517

 Additional Info

New Exhibitor:
No
New Products:
Yes
Displaying Equipment:
Yes
Product Demonstrations:
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Please indicate which industries/technologies your company serves
LED/solid state lighting, MEMS, Other, Photovoltaic, Plastic/organic/flexible electronics, Power Semiconductors, Semiconductor, Flexible and Printed Electronics-, Sensors

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