Plasma-Therm LLC

10050 16th St North
Saint Petersburg,  FL  33716-4219

United States
http://www.plasmatherm.com
  • Booth: 5452

Plasma-Therm is a U.S. manufacturer of advanced plasma-processing equipment, providing etch, deposition, and plasma dicing technologies used in semiconductor packaging, solid-state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, and wireless communication markets. Plasma-Therm’s VERSALINE platform is the workhorse for a variety of applications in specialty semiconductor markets. The platform's modular design allows flexible configuration of substrate handling and technologies that address the wide range of customer requirements. Plasma-Therm’s Singulator® systems bring the precision and speed of plasma dicing to chip-packaging applications. Manufacturers, academic and governmental institutions depend on Plasma-Therm equipment, designed with “lab-to-fab” flexibility to meet the requirements of both R&D and volume production. Plasma-Therm's products have been adopted globally and have earned their reputation for value, reliability, and world-class support.


 Press Releases

  • ST. PETERSBURG, Florida (June 12, 2018) — Plasma-Therm, the manufacturer of leading plasma etch, deposition, and advanced packaging equipment for the production of specialty semiconductor devices, announced today the successful acquisition of CORIAL, a France-based plasma processing equipment supplier.

    “This transaction is expected to produce significant cost savings from operational synergies while increasing the group’s top line revenue by leveraging the combined sales and service network. This acquisition enforces Plasma-Therm’s commitment to the European market by further enhancing our support infrastructure for the European customer base” stated Abdul Lateef, Plasma-Therm CEO. “With this acquisition we take one more step in the execution of our vision of a Technology Center of Excellence and Research in the Grenoble ecosystem” further emphasized Abdul Lateef.

    Thierry Lazerand, Plasma-Therm Director of Marketing said, “CORIAL is a strategic acquisition that strengthens our presence in the R&D market space and for all other markets requiring small footprint and technology-rich equipment. We are also excited about the addition of the experienced team of Engineers with differentiated know-how for product development. The combination will leverage Plasma-Therm’s award-winning service, as recognized by the VLSIresearch Customer Satisfaction Survey”.

    “We are excited to become a subsidiary of Plasma-Therm”, comments Andrei Uvarov, CORIAL’s Chief Research Officer. “It is a great opportunity for CORIAL to consolidate its future and accelerate the development of innovative stand-alone equipment based on joined CORIAL and Plasma-Therm expertise and advance our commercialization initiatives globally”.  

    About Plasma-Therm

    Established in 1974, Plasma-Therm is a manufacturer of advanced plasma processing equipment for specialty semiconductor markets, including advanced packaging, wireless communication, photonics, solid-state lighting, MEMS/NEMS, nanotechnology, renewable energy, data storage, photomask, and R&D. Plasma-Therm offers leading etch and deposition technologies and solutions for these markets. Sales and service locations throughout North America, Europe and Asia-Pacific meet the diverse needs of Plasma-Therm’s global customer base. Visit www.plasmatherm.com for more information.

    About CORIAL

    Built on more than 30 years of combined experience and expertise, CORIAL is the technology leader driving innovation in plasma etch and deposition equipment for specialty semiconductor markets. At CORIAL, we address a range of end-market applications including optoelectronics, failure analysis, MEMS, power devices, advanced packaging, wireless communication and integrated optics. The technologies offered by the company include RIE, ICP, DRIE, ICP-CVD, PECVD, and ALE/ALD. Our R&D team continuously develops and fine-tunes the etching and deposition processes that will enable our customers to structure the materials of today and tomorrow. With unique features such as precise process control for damage free etch, stress free deposition, or in-situ plasma reactor cleaning for the highest industry uptimes, CORIAL is committed to deliver the highest repeatability with the lowest cost of ownership. CORIAL equipment is designed and manufactured in France. Sales and support are provided worldwide through a network of local offices and agents. For more information, please visit our website at www.corial.com

  • ST. PETERSBURG, Fla. (May 18, 2018) — For the 20th year, a worldwide survey of semiconductor manufacturers has resulted in Plasma-Therm winning multiple awards for its systems and superior customer service.

    In the annual Customer Satisfaction Survey conducted by VLSIresearch, Plasma-Therm earned a total of five awards, including two “RANKED 1st” awards. Plasma-Therm earned the highest scores of all companies in two award categories, “Etch & Clean Equipment” and “Focused Suppliers of Chip Making Equipment.”

    Survey participants are asked to rate semiconductor equipment suppliers in 15 categories based on supplier performance, customer service, and product performance.

    “The achievement of two ‘RANKED 1st’ awards and five awards overall is very gratifying” Plasma-Therm CEO Abdul Lateef said. “While we continue to expand our product and application portfolio, we never lose our focus on providing the best service and support. We are working harder than ever to ensure success for all our customers, from small institutions and start-ups to specialty fabs and high-volume manufacturers.”

    In THE BEST Suppliers of Fab Equipment, which includes specialized manufacturers like Plasma-Therm as well as the world’s largest equipment makers, Plasma-Therm ranked higher than every other company besides ASML, the world’s largest maker photolithography supplier. Plasma-Therm also was ranked higher than all other suppliers besides ASML in THE BEST Suppliers of Fab Equipment to Specialty Chip Makers.

    With this year’s awards, Plasma-Therm now has received a total of 42 awards over 20 years of participation in the Customer Satisfaction Survey. VLSIresearch received feedback from more than 94 percent of the chip market in this year’s survey, which was conducted over 2-1/2 months and in five languages. Here is the full list of awards earned by Plasma-Therm in the 2018 Customer Satisfaction Survey:

    • RANKED 1st in FOCUSED SUPPLIERS OF CHIP MAKING EQUIPMENT
    • RANKED 1st in ETCH & CLEAN EQUIPMENT
    • 10 BEST FOCUSED SUPPLIERS OF CHIP MAKING EQUIPMENT
    • THE BEST SUPPLIERS OF FAB EQUIPMENT
    • THE BEST SUPPLIERS OF FAB EQUIPMENT TO SPECIALTY CHIP MAKERS

    About Plasma-Therm

    Established in 1974, Plasma-Therm is a manufacturer of advanced plasma processing equipment for specialty semiconductor markets, including advanced packaging, wireless communication, photonics, solid-state lighting, MEMS/NEMS, nanotechnology, renewable energy, data storage, photomask, and R&D. Plasma-Therm offers leading etch and deposition technologies and solutions for these markets. Sales and service locations throughout North America, Europe and Asia-Pacific meet the diverse needs of Plasma-Therm’s global customer base. Visit www.plasmatherm.com for more information.

    About VLSIresearch

    VLSIresearch is an award-winning provider of market research and economic analysis on the technical, business, and economic aspects of the semiconductor supply chain.  Providing intelligence for faster and better decision making, seasoned executives in high technology, government, and finance rely on VLSIresearch’s insights to guide them to the right decisions. The formula is simple: Better intelligence leads to better decisions which deliver better results.  Founded in 1976, VLSIresearch is the leading technology research and advisory company focused on semiconductor related manufacturing.

  • ST. PETERSBURG, Florida (April 4, 2018) — Plasma-Therm today announced that it has acquired KOBUS, an innovative plasma deposition company, which enables F.A.S.T®, a valuable alternative to ALD where thick and conformal films are required.

    This unique deposition method is at the crossroads of ALD and CVD: F.A.S.T. stands for “Fast Atomic Sequential Technology.” F.A.S.T. is enabled by proprietary CVD reactor design combined with pulsing capability, and while capable of depositing in traditional ALD mode, it is optimal for thick and conformal layer deposition and offers new solutions for 3D integration challenges.

    KOBUS offers a unique portfolio of equipment for both mature and advanced materials deposition, which merges well with Plasma-Therm’s operation, expanding the plasma-based deposition and etch suite of products for all silicon and compound semiconductor emerging applications. 

    This acquisition will allow Plasma-Therm to establish a solid base in Europe and conduct R&D development in the Grenoble “Silicon Valley,” a region fueled with R&D, startups and large semiconductor corporations.

    About Plasma-Therm

    Plasma-Therm LLC is a manufacturer of leading plasma etch, deposition, and advanced packaging equipment for specialty semiconductor and nanotechnology markets. Plasma-Therm's plasma-processing and advanced-packaging solutions are used in research, pilot manufacturing, and volume production of wireless, photonics, solid state lighting, MEMS/NEMS, data storage and other devices. Learn more at http://www.plasmatherm.com


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