Gripping Power, Inc.

11930 44th Street North
Clearwater,  FL  33762

United States
https://www.grippingpower.com/
  • Booth: 322


Visit Gripping Power, Inc. in the South Hall at Booth 322.



Since 2002, Gripping Power has produced electrostatic chuck power supplies which are bipolar, isolated and regulated. They are compatible with monopole and bipolar Coulombic and Johnsen-Rahbek electrostatic chucks and have proven reliability in applications such as RIE, ICP, PECVD and EUV lithography. They can support 150mm, 200mm and 300mm semiconductor wafer production and 450mm process development. 

High voltage cable assemblies, RF traps and OEM specific packaging options are also available.

We can also provide electronic circuit design, PCB assembly, cable harness fabrication, aluminum and steel enclosure fabrication and complete industrial PC-based automation systems for semiconductor process industry applications via our associated vendors.

www.grippingpower.com
sales@grippingpower.com
+1 (727) 572-4100


 Products

  • GPA Series High Voltage Power Supplies
    GPA Series are low-cost, regulated, high-voltage power supplies...

  • NEW PRODUCTS

    The GPA Series are low-cost, regulated, fully-floating high-voltage power supplies and are available configured as entry-level electrostatic chuck power supplies, general purpose bipolar power supplies or unipolar bias power supplies. 

    GPA Series Electrostatic Chuck Power Supplies*
    GPA150E – 0 to ±1.5kV, 12W bipolar, fully floating, electrostatic chuck power supply
    GPA300E – 0 to ±3.0kV, 25W bipolar, fully floating, electrostatic chuck power supply

    GPA Series Floating High Voltage Power Supplies*
    GPA150F – 0 to ±1.5kV, 12W bipolar, fully floating, high voltage power supply
    GPA300F – 0 to ±3.0kV, 25W bipolar, fully floating, high voltage power supply

    GPA Series Bipolar Power Supplies*
    GPA150B – 0 to ±1.5kV, 12W bipolar, high voltage power supply
    GPA300B – 0 to ±3.0kV, 25W bipolar, high voltage power supply

    GPA Series Unipolar Power Supplies*
    GPA150U – 0 to 1.5kV, 12W unipolar, high voltage power supply
    GPA300U – 0 to 3.0kV, 25W unipolar, high voltage power supply

    GPA Series B and U variant power supplies have a single, ground referenced high voltage output.

    GPA Series U variant power supplies are factory configured for negative or positive output. Specify P or N suffix when ordering.

    All GPA series power supplies operate from 24VDC (1.5A max) and include rack-mounting hardware.

    *Available Q3 2018

  • GPS Series Electrostatic Chuck Power Supplies
    GPS series are bipolar, floating, fully-programmable, electrostatic chuck power supplies in a compact, embedded enclosure....

  • NEW PRODUCTS*

    The GPS series are bipolar, floating, fully-programmable, electrostatic chuck power supplies in a compact, embedded enclosure. They are compatible with Coulombic and Johnsen-Rahbek electrostatic chucks in applications such as RIE, ICP, PECVD and EUV lithography.

    Features
    • Modest-power capability for driving Coulombic or Johnsen-Rahbek electrostatic chucks
    • Output can be fully-floating, ground referenced or biased
    • Voltage output follows user defined chuck and dechuck algorithms
    • Up to four different chuck and dechuck programs can be edited and stored for process flexibility
    • Operation can be controlled via analog and digital I/O or the USB interface interface
    • Wafer sensor adapts to various chuck sizes and RF delivery systems
    • Compact in size and can be mounted in any orientation
    • Backward compatiblity with the legacy EPS300 power supply

    Electrical
    GPS series power supplies are factory configured to operate from 24VDC. (1.5A max)

    Mechanical
    Dimensions: 63.0mm (H) x 152.4mm (W) x 254.0mm (L)

    GPS150 – 0 to ±1.5kV, 12W (8.5mA continuous) bipolar, fully floating, electrostatic chuck power supply
    GPS300 – 0 to ±3.0kV, 25W (8.5mA continuous) bipolar, fully floating, electrostatic chuck power supply

    All GPS series power supplies operate from 24VDC (2A max).

    *Available Q3 2018

  • GPX Series Electrostatic Chuck Power Supplies
    GPX series are bipolar, floating, high-power, fully-programmable, electrostatic chuck power supplies....

  • NEW PRODUCTS*

    The GPX series are bipolar, floating, high-power, fully-programmable, electrostatic chuck power supplies for 200mm, 300mm and 450mm semiconductor wafer processing. They are compatible with Coulombic and Johnsen-Rahbek electrostatic chucks in applications such as RIE, ICP, PECVD and EUV lithography.

    Features
    • High-power capability for driving large-area Johnsen-Rahbek electrostatic chucks
    • Efficient switch-mode topology runs cool without forced air
    • Output can be fully-floating, ground referenced or biased
    • Voltage output follows user defined chuck and dechuck algorithms
    • Up to four chuck and dechuck programs can be edited and stored for process flexibility
    • Operation can be controlled by the front panel, analog and digital I/O, USB interface or Ethernet interface
    • Wafer sensor adapts to various chuck sizes and RF delivery systems
    • Small size conserves instrument rack space


    Electrical

    GPX series power supplies can be factory configured to operate from 24VDC or 100-240 VAC 50/60Hz.

    Mechanical
    Dimensions: 82.5mm (H) x 210.0mm (W) x 300mm (D), 2U rack enclosure
    Panel Width: 241.3 mm (half-rack)

    GPX300 – 0 to ±3.0kV, 25W (8.5mA continuous) bipolar, fully floating, electrostatic chuck power supply
    GPX600 – 0 to ±6.0kV, 50W (8.5mA continuous) bipolar, fully floating, electrostatic chuck power supply

    GPX series power supplies can be factory configured to operate from 24VDC or 100-240 VAC 50/60Hz. Rack-mounting hardware is included.

    *Available Q3 2018


 Additional Info

New Exhibitor:
Yes
New Products:
Yes
Displaying Equipment:
Yes
Product Demonstrations:
Yes
Please indicate which industries/technologies your company serves
LED/solid state lighting, MEMS, Photovoltaic, Power Semiconductors, Semiconductor

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