The COMPACT Sorter G5+ is the latest generation of 300mm COMPACT wafer sorters from RECIF Technologies. Its innovative design offers a soft breakthrough thanks to its field proven modules and technologies such as real time filed bus, direct drive transmission and many other technical advances.
It also provides the highest throughput ever achieved with a single robot, the smallest footprint and unsurpassed cleanliness demonstrated, as well as extremely secure wafer handling.
The RECIF Technologies COMPACT wafer sorter G5+ 300mm is providing IC manufacturers the ultimate productivity solution for 10 nm nodes and beyond.
Main features :
- Vacuum free backside contact or edge contact end effector
- On the fly wafer alignment
- N2 purge capability on load ports
- Industrial controller
- Real time field bus and electronics
- Single wafer flipper or single wafer buffer in dedicated casing option
- 4LP in line can be integrated into stocker
- Easy recipe creator software
Further information available upon request