High-Performance Wafer Handling Automation Systems
The WaferMate300 is a highly configurable, BOLTS-compatible robotic wafer-handling platform that mates high performance with cost competitiveness. As an ISO Class-2 clean EFEM, this platform includes all applicable mini-environment components, E84 compliance, and rear hand-off.
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Supports a wide range of wafer process tools & environments
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Available in single and dual load port configurations
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Can service up to 3 process tools at once
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Adaptable for 200mm and smaller
substrates